JPH0479036U - - Google Patents
Info
- Publication number
- JPH0479036U JPH0479036U JP12240490U JP12240490U JPH0479036U JP H0479036 U JPH0479036 U JP H0479036U JP 12240490 U JP12240490 U JP 12240490U JP 12240490 U JP12240490 U JP 12240490U JP H0479036 U JPH0479036 U JP H0479036U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- base body
- groove portion
- exhaust hole
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 238000001179 sorption measurement Methods 0.000 claims 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
第１図から第４図迄は、本考案による基板吸着
固定治具を示すためのもので、第１図は第２図の
Ａ−Ａ線による断面図、第２図は第１図の側面図
、第３図は第２図の底面図、第４Ａ図は吸着状態
を示す拡大断面図、第４Ｂ図はＯリング装着前の
溝部を示す断面図、第５図は従来の基板吸着固定
治具を示す要部の拡大断面図である。
１は基体、１ａは端面、３は排気孔、４は開口
凹部、１０はＯリング、１０ａは外端である。
1 to 4 are for showing the substrate suction and fixing jig according to the present invention. FIG. 1 is a sectional view taken along line A-A in FIG. 2, and FIG. 3 is a bottom view of FIG. 2, FIG. 4A is an enlarged cross-sectional view showing the suction state, FIG. 4B is a cross-sectional view showing the groove before the O-ring is installed, and FIG. 5 is a conventional board suction fixing tool. FIG. 3 is an enlarged sectional view of a main part of the tool. 1 is a base body, 1a is an end surface, 3 is an exhaust hole, 4 is an opening recess, 10 is an O-ring, and 10a is an outer end.
Claims (1)
１と、前記溝部４に設けられたＯリング１０とを
有し、前記Ｏリング１０の外端１０ａは、前記基
体１の端面１ａよりも突出して構成されているこ
とを特徴とする基板吸着固定治具。 It has a base body 1 having an exhaust hole 3 and a groove portion 4 for exhausting air, and an O-ring 10 provided in the groove portion 4, and an outer end 10a of the O-ring 10 protrudes beyond an end surface 1a of the base body 1. A substrate adsorption/fixing jig characterized in that the jig is comprised of:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12240490U JPH0479036U (en) | 1990-11-26 | 1990-11-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12240490U JPH0479036U (en) | 1990-11-26 | 1990-11-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0479036U true JPH0479036U (en) | 1992-07-09 |
Family
ID=31870187
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12240490U Pending JPH0479036U (en) | 1990-11-26 | 1990-11-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0479036U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9081549B2 (en) | 2012-10-31 | 2015-07-14 | Kabushiki Kaisha Toshiba | Supporting apparatus, support member, and electronic device |
-
1990
- 1990-11-26 JP JP12240490U patent/JPH0479036U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9081549B2 (en) | 2012-10-31 | 2015-07-14 | Kabushiki Kaisha Toshiba | Supporting apparatus, support member, and electronic device |