JPS6437858A - Semiconductor integrated circuit - Google Patents

Semiconductor integrated circuit

Info

Publication number
JPS6437858A
JPS6437858A JP62194962A JP19496287A JPS6437858A JP S6437858 A JPS6437858 A JP S6437858A JP 62194962 A JP62194962 A JP 62194962A JP 19496287 A JP19496287 A JP 19496287A JP S6437858 A JPS6437858 A JP S6437858A
Authority
JP
Japan
Prior art keywords
groove
substrate
fillers
oxide film
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62194962A
Other languages
English (en)
Inventor
Yukio Kamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62194962A priority Critical patent/JPS6437858A/ja
Publication of JPS6437858A publication Critical patent/JPS6437858A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
    • H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Semiconductor Memories (AREA)
JP62194962A 1987-08-03 1987-08-03 Semiconductor integrated circuit Pending JPS6437858A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62194962A JPS6437858A (en) 1987-08-03 1987-08-03 Semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62194962A JPS6437858A (en) 1987-08-03 1987-08-03 Semiconductor integrated circuit

Publications (1)

Publication Number Publication Date
JPS6437858A true JPS6437858A (en) 1989-02-08

Family

ID=16333226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62194962A Pending JPS6437858A (en) 1987-08-03 1987-08-03 Semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS6437858A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9018676B2 (en) 2012-09-10 2015-04-28 Fujitsu Limited Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9018676B2 (en) 2012-09-10 2015-04-28 Fujitsu Limited Semiconductor device

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