JPS6437015A - Formation of conductive organic film - Google Patents
Formation of conductive organic filmInfo
- Publication number
- JPS6437015A JPS6437015A JP19296687A JP19296687A JPS6437015A JP S6437015 A JPS6437015 A JP S6437015A JP 19296687 A JP19296687 A JP 19296687A JP 19296687 A JP19296687 A JP 19296687A JP S6437015 A JPS6437015 A JP S6437015A
- Authority
- JP
- Japan
- Prior art keywords
- sulfonic acid
- substrate
- acid ammonium
- organic film
- conductive organic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To enable a very thin conductive film to be formed while avoiding any metallic pollution by a method wherein a substrate is spin-coated with a water or methylalcohol solution of polystyrene sulfonic acid ammonium and then heat treated. CONSTITUTION:A specified substrate is spin-coated with a thinly melted down polystyrene sulfonic acid ammonium water solution. At this time, it is recommended that the weight ratio of plystyrene sulfonic acid ammonium is specified within the range of 5-30%. Next, the substrate is heat treated at the temperature, e.g., not exceeding 250 deg.C. Through these procedures, a conductive organic film containing metallic impurity not exceeding 1ppm and in no danger of metallic pollution can be formed in extremely thin thickness of 0.1-2mum.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62192966A JP2506801B2 (en) | 1987-07-31 | 1987-07-31 | Method for forming conductive organic film |
US07/602,930 US5139922A (en) | 1987-04-10 | 1990-10-25 | Method of making resist pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62192966A JP2506801B2 (en) | 1987-07-31 | 1987-07-31 | Method for forming conductive organic film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6437015A true JPS6437015A (en) | 1989-02-07 |
JP2506801B2 JP2506801B2 (en) | 1996-06-12 |
Family
ID=16300005
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62192966A Expired - Lifetime JP2506801B2 (en) | 1987-04-10 | 1987-07-31 | Method for forming conductive organic film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2506801B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210313895A1 (en) * | 2020-04-06 | 2021-10-07 | Astec International Limited | Transformers for multiphase power converters |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS589056A (en) * | 1981-07-08 | 1983-01-19 | Sharp Corp | Moisture sensitive resistance element |
-
1987
- 1987-07-31 JP JP62192966A patent/JP2506801B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS589056A (en) * | 1981-07-08 | 1983-01-19 | Sharp Corp | Moisture sensitive resistance element |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20210313895A1 (en) * | 2020-04-06 | 2021-10-07 | Astec International Limited | Transformers for multiphase power converters |
US11711020B2 (en) | 2020-04-06 | 2023-07-25 | Astec International Limited | Transformers for multiphase power converters |
Also Published As
Publication number | Publication date |
---|---|
JP2506801B2 (en) | 1996-06-12 |
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