JPS6437015A - Formation of conductive organic film - Google Patents

Formation of conductive organic film

Info

Publication number
JPS6437015A
JPS6437015A JP19296687A JP19296687A JPS6437015A JP S6437015 A JPS6437015 A JP S6437015A JP 19296687 A JP19296687 A JP 19296687A JP 19296687 A JP19296687 A JP 19296687A JP S6437015 A JPS6437015 A JP S6437015A
Authority
JP
Japan
Prior art keywords
sulfonic acid
substrate
acid ammonium
organic film
conductive organic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19296687A
Other languages
Japanese (ja)
Other versions
JP2506801B2 (en
Inventor
Yoshihiro Todokoro
Hisashi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electronics Corp filed Critical Matsushita Electronics Corp
Priority to JP62192966A priority Critical patent/JP2506801B2/en
Publication of JPS6437015A publication Critical patent/JPS6437015A/en
Priority to US07/602,930 priority patent/US5139922A/en
Application granted granted Critical
Publication of JP2506801B2 publication Critical patent/JP2506801B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To enable a very thin conductive film to be formed while avoiding any metallic pollution by a method wherein a substrate is spin-coated with a water or methylalcohol solution of polystyrene sulfonic acid ammonium and then heat treated. CONSTITUTION:A specified substrate is spin-coated with a thinly melted down polystyrene sulfonic acid ammonium water solution. At this time, it is recommended that the weight ratio of plystyrene sulfonic acid ammonium is specified within the range of 5-30%. Next, the substrate is heat treated at the temperature, e.g., not exceeding 250 deg.C. Through these procedures, a conductive organic film containing metallic impurity not exceeding 1ppm and in no danger of metallic pollution can be formed in extremely thin thickness of 0.1-2mum.
JP62192966A 1987-04-10 1987-07-31 Method for forming conductive organic film Expired - Lifetime JP2506801B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP62192966A JP2506801B2 (en) 1987-07-31 1987-07-31 Method for forming conductive organic film
US07/602,930 US5139922A (en) 1987-04-10 1990-10-25 Method of making resist pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62192966A JP2506801B2 (en) 1987-07-31 1987-07-31 Method for forming conductive organic film

Publications (2)

Publication Number Publication Date
JPS6437015A true JPS6437015A (en) 1989-02-07
JP2506801B2 JP2506801B2 (en) 1996-06-12

Family

ID=16300005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62192966A Expired - Lifetime JP2506801B2 (en) 1987-04-10 1987-07-31 Method for forming conductive organic film

Country Status (1)

Country Link
JP (1) JP2506801B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210313895A1 (en) * 2020-04-06 2021-10-07 Astec International Limited Transformers for multiphase power converters

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589056A (en) * 1981-07-08 1983-01-19 Sharp Corp Moisture sensitive resistance element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589056A (en) * 1981-07-08 1983-01-19 Sharp Corp Moisture sensitive resistance element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20210313895A1 (en) * 2020-04-06 2021-10-07 Astec International Limited Transformers for multiphase power converters
US11711020B2 (en) 2020-04-06 2023-07-25 Astec International Limited Transformers for multiphase power converters

Also Published As

Publication number Publication date
JP2506801B2 (en) 1996-06-12

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