JPS53126272A - Fabrication of multilayer insulation films - Google Patents

Fabrication of multilayer insulation films

Info

Publication number
JPS53126272A
JPS53126272A JP4038177A JP4038177A JPS53126272A JP S53126272 A JPS53126272 A JP S53126272A JP 4038177 A JP4038177 A JP 4038177A JP 4038177 A JP4038177 A JP 4038177A JP S53126272 A JPS53126272 A JP S53126272A
Authority
JP
Japan
Prior art keywords
fabrication
insulation films
multilayer insulation
films
multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4038177A
Other languages
Japanese (ja)
Inventor
Yuji Tanida
Kunio Hayashi
Nobuo Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4038177A priority Critical patent/JPS53126272A/en
Publication of JPS53126272A publication Critical patent/JPS53126272A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To fabricate SiO2 films of changing phosphorus concentrations to desired shapes by controlling the mixed solution of HF + NH4F + water to specified temperatures.
COPYRIGHT: (C)1978,JPO&Japio
JP4038177A 1977-04-11 1977-04-11 Fabrication of multilayer insulation films Pending JPS53126272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4038177A JPS53126272A (en) 1977-04-11 1977-04-11 Fabrication of multilayer insulation films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4038177A JPS53126272A (en) 1977-04-11 1977-04-11 Fabrication of multilayer insulation films

Publications (1)

Publication Number Publication Date
JPS53126272A true JPS53126272A (en) 1978-11-04

Family

ID=12579066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4038177A Pending JPS53126272A (en) 1977-04-11 1977-04-11 Fabrication of multilayer insulation films

Country Status (1)

Country Link
JP (1) JPS53126272A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086825A (en) * 1983-10-19 1985-05-16 Matsushita Electronics Corp Manufacture of semiconductor device
JPH04252031A (en) * 1991-01-28 1992-09-08 Nec Corp Insulating film and its formation, formation of insulating-film pattern and manufacture of semiconductor device
WO1998027579A1 (en) * 1996-12-18 1998-06-25 Stella Chemifa Kabushiki Kaisha Etchants
CN105511665A (en) * 2014-10-10 2016-04-20 三星显示有限公司 Display device and method of manufacturing the same

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6086825A (en) * 1983-10-19 1985-05-16 Matsushita Electronics Corp Manufacture of semiconductor device
JPH04252031A (en) * 1991-01-28 1992-09-08 Nec Corp Insulating film and its formation, formation of insulating-film pattern and manufacture of semiconductor device
WO1998027579A1 (en) * 1996-12-18 1998-06-25 Stella Chemifa Kabushiki Kaisha Etchants
US6585910B1 (en) 1996-12-18 2003-07-01 Stella Chemifa Kabushiki Kaisha Etchant
US6821452B2 (en) 1996-12-18 2004-11-23 Hirohisa Kikuyama Etchant
CN105511665A (en) * 2014-10-10 2016-04-20 三星显示有限公司 Display device and method of manufacturing the same
US10444884B2 (en) 2014-10-10 2019-10-15 Samsung Display Co., Ltd. Display Device
US10739895B2 (en) 2014-10-10 2020-08-11 Samsung Display Co., Ltd. Display device

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