JPS53126272A - Fabrication of multilayer insulation films - Google Patents
Fabrication of multilayer insulation filmsInfo
- Publication number
- JPS53126272A JPS53126272A JP4038177A JP4038177A JPS53126272A JP S53126272 A JPS53126272 A JP S53126272A JP 4038177 A JP4038177 A JP 4038177A JP 4038177 A JP4038177 A JP 4038177A JP S53126272 A JPS53126272 A JP S53126272A
- Authority
- JP
- Japan
- Prior art keywords
- fabrication
- insulation films
- multilayer insulation
- films
- multilayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To fabricate SiO2 films of changing phosphorus concentrations to desired shapes by controlling the mixed solution of HF + NH4F + water to specified temperatures.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4038177A JPS53126272A (en) | 1977-04-11 | 1977-04-11 | Fabrication of multilayer insulation films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4038177A JPS53126272A (en) | 1977-04-11 | 1977-04-11 | Fabrication of multilayer insulation films |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53126272A true JPS53126272A (en) | 1978-11-04 |
Family
ID=12579066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4038177A Pending JPS53126272A (en) | 1977-04-11 | 1977-04-11 | Fabrication of multilayer insulation films |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53126272A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6086825A (en) * | 1983-10-19 | 1985-05-16 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPH04252031A (en) * | 1991-01-28 | 1992-09-08 | Nec Corp | Insulating film and its formation, formation of insulating-film pattern and manufacture of semiconductor device |
WO1998027579A1 (en) * | 1996-12-18 | 1998-06-25 | Stella Chemifa Kabushiki Kaisha | Etchants |
CN105511665A (en) * | 2014-10-10 | 2016-04-20 | 三星显示有限公司 | Display device and method of manufacturing the same |
-
1977
- 1977-04-11 JP JP4038177A patent/JPS53126272A/en active Pending
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6086825A (en) * | 1983-10-19 | 1985-05-16 | Matsushita Electronics Corp | Manufacture of semiconductor device |
JPH04252031A (en) * | 1991-01-28 | 1992-09-08 | Nec Corp | Insulating film and its formation, formation of insulating-film pattern and manufacture of semiconductor device |
WO1998027579A1 (en) * | 1996-12-18 | 1998-06-25 | Stella Chemifa Kabushiki Kaisha | Etchants |
US6585910B1 (en) | 1996-12-18 | 2003-07-01 | Stella Chemifa Kabushiki Kaisha | Etchant |
US6821452B2 (en) | 1996-12-18 | 2004-11-23 | Hirohisa Kikuyama | Etchant |
CN105511665A (en) * | 2014-10-10 | 2016-04-20 | 三星显示有限公司 | Display device and method of manufacturing the same |
US10444884B2 (en) | 2014-10-10 | 2019-10-15 | Samsung Display Co., Ltd. | Display Device |
US10739895B2 (en) | 2014-10-10 | 2020-08-11 | Samsung Display Co., Ltd. | Display device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5221296A (en) | Producing method of concentrated phosphoric acid containing gypsum hem ihydrate which can be easily filtrated | |
JPS5290485A (en) | Oxygen absorbent | |
JPS53126272A (en) | Fabrication of multilayer insulation films | |
JPS5211525A (en) | Method of manufacturing headrests | |
JPS52285A (en) | Preparation of n1 *22tetrahydrofuryl**55fluorouracil | |
JPS51130936A (en) | Water heater utilizing solar heat | |
JPS542070A (en) | Manufacture for semiconductor element | |
JPS5258335A (en) | Program extending method by rom cassette system | |
JPS52106844A (en) | 3-cyanomethylcyclopentanone derivatives | |
JPS527668A (en) | Method of manufacturing microchannel plates | |
JPS5232675A (en) | Etching solution for chemical compound | |
JPS5321186A (en) | Penicillanic acid derivatives and their preparation | |
JPS52153923A (en) | Preparation of 2-amino-4-alkoxyphenols | |
JPS5338982A (en) | Taper etching method | |
JPS5385558A (en) | Heat insulation casing | |
JPS5414952A (en) | 1-halogenocarbonyltricyclo(4,3,1,12,5)undecane | |
JPS5264011A (en) | Waterproof treatment of underground tank | |
JPS52106674A (en) | Semiconductor device | |
JPS5392666A (en) | Manufacture of semiconductor device | |
JPS53145574A (en) | Oxidation method of silicon wafers | |
JPS5346937A (en) | Preparation of n-p-aminobenzoyl-n,-p-aminourea | |
JPS5346968A (en) | Novel hexadecapeptides | |
JPS5377485A (en) | Production of piezo-vibrator | |
JPS51142848A (en) | Cooling method of building | |
JPS5368897A (en) | Oxide dielectric material |