JPS6436019A - Mask adhesion device and usage of same - Google Patents

Abstract

PURPOSE:To secure the high flatness, the positional accuracy and the interval accuracy by providing the following: an alignment function or an X-ray mask and a reinforcement frame; a function to measure the flatness of the X-ray mask; a suction function to correct the flatness of the X-ray mask and to hold the X-ray mask. CONSTITUTION:Two or more alignment marks 17 are formed on the rear of the X-ray mask 16; alignment marks 19 corresponding to the marks are formed on a reinforcement frame 18. Then, the X-ray mask 16 is mounted on a suction mechanism 12 of a vacuum chuck system in such a way that a pattern-formed part of an absorber of the X-ray mask 16 is situated on an escape hole 13; it is sucked and held. Then, the flatness of the X-ray mask 16 in a sucked and held state is measured by using a flatness measuring optical system 15 of Fizeau's interference system; while a suction force is adjusted, the high flatness is corrected. Then, the reinforcement frame 18 composed of quartz or the like is mounted on the X-ray mask 16; the mutual alignment marks 17, 19 are detected and aligned by using an alignment optical system 14 such as an optical microscope or the like. Lastly, an epoxy adhesive 20 applied between the masks is solidified.