JPS643524A - Infrared detecting element - Google Patents
Infrared detecting elementInfo
- Publication number
- JPS643524A JPS643524A JP62159974A JP15997487A JPS643524A JP S643524 A JPS643524 A JP S643524A JP 62159974 A JP62159974 A JP 62159974A JP 15997487 A JP15997487 A JP 15997487A JP S643524 A JPS643524 A JP S643524A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- high sensitivity
- pb5ge3o11
- polarization direction
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
- Inorganic Insulating Materials (AREA)
Abstract
PURPOSE:To obtain an IR detecting element of high sensitivity which can be formed at a low temp. by forming a thin film of Pb5Ge3O11 as a pyroelectric material and providing electrodes on a face perpendicular to the polarization direction of the thin film. CONSTITUTION:An Si wafer is used as a thin film substrate 1 and the lower electrode 2 consisting of a thin platinum film is formed by high-frequency sputtering. The thin film 3 is then formed by high-frequency sputtering using Pb5Ge3O11 powder as a target. The upper electrode 4 is further formed on the thin film 3 by vapor deposition of a nichrome electrode. After the thin film 3 is subjected to a polarization treatment, the substrate in a photodetecting part is removed by etching to form an aperture 5. The element formed in such a manner has the high sensitivity to the detection of the IR rays projected from the polarization direction and the Curie temp. thereof exhibits a high value. The formation of the element at the low temp. is thereby enabled and the element capable of detecting IR rays with the high sensitivity is obtd.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62159974A JPS643524A (en) | 1987-06-26 | 1987-06-26 | Infrared detecting element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62159974A JPS643524A (en) | 1987-06-26 | 1987-06-26 | Infrared detecting element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS643524A true JPS643524A (en) | 1989-01-09 |
Family
ID=15705241
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62159974A Pending JPS643524A (en) | 1987-06-26 | 1987-06-26 | Infrared detecting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS643524A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06146035A (en) * | 1992-11-13 | 1994-05-27 | Sumimoto Kagaku Kenkyusho:Kk | Method for washing machine parts |
JPH06146034A (en) * | 1992-11-13 | 1994-05-27 | Sumimoto Kagaku Kenkyusho:Kk | Method for washing machine parts |
-
1987
- 1987-06-26 JP JP62159974A patent/JPS643524A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06146035A (en) * | 1992-11-13 | 1994-05-27 | Sumimoto Kagaku Kenkyusho:Kk | Method for washing machine parts |
JPH06146034A (en) * | 1992-11-13 | 1994-05-27 | Sumimoto Kagaku Kenkyusho:Kk | Method for washing machine parts |
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