JPS643360B2 - - Google Patents

Info

Publication number
JPS643360B2
JPS643360B2 JP56144396A JP14439681A JPS643360B2 JP S643360 B2 JPS643360 B2 JP S643360B2 JP 56144396 A JP56144396 A JP 56144396A JP 14439681 A JP14439681 A JP 14439681A JP S643360 B2 JPS643360 B2 JP S643360B2
Authority
JP
Japan
Prior art keywords
rail
feed
parallel
feed screw
driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56144396A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5844792A (ja
Inventor
Takeshi Nakamura
Shinpei Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56144396A priority Critical patent/JPS5844792A/ja
Publication of JPS5844792A publication Critical patent/JPS5844792A/ja
Publication of JPS643360B2 publication Critical patent/JPS643360B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/072—Connecting or disconnecting of bump connectors
    • H10W72/07251—Connecting or disconnecting of bump connectors characterised by changes in properties of the bump connectors during connecting
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps

Landscapes

  • Supply And Installment Of Electrical Components (AREA)
  • Wire Bonding (AREA)
JP56144396A 1981-09-11 1981-09-11 Ｘ―ｙテーブルの構造 Granted JPS5844792A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56144396A JPS5844792A (ja) 1981-09-11 1981-09-11 Ｘ―ｙテーブルの構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56144396A JPS5844792A (ja) 1981-09-11 1981-09-11 Ｘ―ｙテーブルの構造

Publications (2)

Publication Number Publication Date
JPS5844792A JPS5844792A (ja) 1983-03-15
JPS643360B2 true JPS643360B2 (ref) 1989-01-20

Family

ID=15361177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56144396A Granted JPS5844792A (ja) 1981-09-11 1981-09-11 Ｘ―ｙテーブルの構造

Country Status (1)

Country Link
JP (1) JPS5844792A (ref)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH044462U (ref) * 1990-04-24 1992-01-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH044462U (ref) * 1990-04-24 1992-01-16

Also Published As

Publication number Publication date
JPS5844792A (ja) 1983-03-15

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