JPS6433566U - - Google Patents
Info
- Publication number
- JPS6433566U JPS6433566U JP12686487U JP12686487U JPS6433566U JP S6433566 U JPS6433566 U JP S6433566U JP 12686487 U JP12686487 U JP 12686487U JP 12686487 U JP12686487 U JP 12686487U JP S6433566 U JPS6433566 U JP S6433566U
- Authority
- JP
- Japan
- Prior art keywords
- butterfly valve
- flow rate
- pressure regulating
- regulating device
- rate control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001105 regulatory effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案装置の一実施例を示すブロツク
図、第２図及び第３図はそれぞれ従来装置の例を
示すブロツク図、第４図ａ，ｂはそれぞれ従来装
置及び本考案装置を用いた場合の生成圧力パター
ンを示す図、第５図はバタフライバルブの開度と
圧力の関係を示した図である。
１……反応室、３……排気バルブ、４……バタ
フライバルブ、５……スローポンプ（メカニカル
ブースタポンプ）、６……メインポンプ（ロータ
リーポンプ）、９……エアーバルブ、１０……流
量制御装置（マスフローコントローラ）。
FIG. 1 is a block diagram showing an example of the device of the present invention, FIGS. 2 and 3 are block diagrams showing examples of conventional devices, and FIGS. 4a and b show the conventional device and the device of the present invention, respectively. FIG. 5 is a diagram showing the relationship between the opening degree of the butterfly valve and the pressure. 1... Reaction chamber, 3... Exhaust valve, 4... Butterfly valve, 5... Slow pump (mechanical booster pump), 6... Main pump (rotary pump), 9... Air valve, 10... Flow rate control Equipment (mass flow controller).
Claims (1)
て、バタフライバルブ４の手前に、Ｎ２ガスの流
量を任意に設定できる流量制御装置１０を接続せ
しめてなる減圧ＣＶＤ装置における圧力調整装置
。 A pressure regulating device for a reduced pressure CVD apparatus, which is a pressure regulating device using a butterfly valve 4, in which a flow rate control device 10 that can arbitrarily set the flow rate of N2 gas is connected before the butterfly valve 4.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12686487U JPS6433566U (en) | 1987-08-19 | 1987-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12686487U JPS6433566U (en) | 1987-08-19 | 1987-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6433566U true JPS6433566U (en) | 1989-03-01 |
Family
ID=31378771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12686487U Pending JPS6433566U (en) | 1987-08-19 | 1987-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6433566U (en) |
-
1987
- 1987-08-19 JP JP12686487U patent/JPS6433566U/ja active Pending
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