JPH0422035U - - Google Patents
Info
- Publication number
- JPH0422035U JPH0422035U JP6483990U JP6483990U JPH0422035U JP H0422035 U JPH0422035 U JP H0422035U JP 6483990 U JP6483990 U JP 6483990U JP 6483990 U JP6483990 U JP 6483990U JP H0422035 U JPH0422035 U JP H0422035U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- slow
- circuit
- exhaust circuit
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案回路の１実施例の構成を示す説
明図、第２図は本考案回路を用いた時の流量制御
バルブのバルブ開度に対する、反応室と排気装置
の接続口での流速の関係を示す説明図、第３図は
従来回路の一例の構成を示す説明図である。
１……主排気回路、２……スロー排気回路、３
……メインバルブ、４……スロー排気バルブ、５
……真空ゲージ、６……流量制御バルブ、７……
流量制御バルブコントローラ、８……反応室、９
……排気装置、１０……モータ。
Fig. 1 is an explanatory diagram showing the configuration of one embodiment of the circuit of the present invention, and Fig. 2 shows the flow velocity at the connection port between the reaction chamber and the exhaust device with respect to the valve opening of the flow control valve when the circuit of the present invention is used. FIG. 3 is an explanatory diagram showing the structure of an example of a conventional circuit. 1...Main exhaust circuit, 2...Slow exhaust circuit, 3
...Main valve, 4...Slow exhaust valve, 5
...Vacuum gauge, 6...Flow rate control valve, 7...
Flow rate control valve controller, 8...Reaction chamber, 9
...Exhaust system, 10...Motor.
Claims (1)
該主排気回路１に並列に接続されたスロー排気回
路２中のスロー排気バルブ４を介して反応室８内
を排気装置９により排気する真空排気装置におい
て、反応室８の排気口部に真空ゲージ５を設け、
スロー排気回路２中に流量制御バルブ６を設けて
なる真空排気装置のスロー排気回路。 (2) 真空ゲージ５の出力信号に応じて流量制御
バルブ６をコントロールする流量制御バルブコン
トローラ７をスロー排気回路２中に設けてなる請
求項第(1)項記載の真空排気装置のスロー排気回
路。[Claims for Utility Model Registration] (1) The inside of the reaction chamber 8 is supplied via the main valve 3 in the main exhaust circuit 1 or the slow exhaust valve 4 in the slow exhaust circuit 2 connected in parallel to the main exhaust circuit 1. In a vacuum evacuation device for evacuation using an evacuation device 9, a vacuum gauge 5 is provided at the exhaust port of the reaction chamber 8,
A slow exhaust circuit of a vacuum exhaust system, which includes a flow control valve 6 in a slow exhaust circuit 2. (2) A slow exhaust circuit for a vacuum exhaust system according to claim (1), wherein a flow rate control valve controller 7 for controlling a flow rate control valve 6 according to an output signal of the vacuum gauge 5 is provided in the slow exhaust circuit 2. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6483990U JPH0422035U (en) | 1990-06-18 | 1990-06-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6483990U JPH0422035U (en) | 1990-06-18 | 1990-06-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0422035U true JPH0422035U (en) | 1992-02-24 |
Family
ID=31596137
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6483990U Pending JPH0422035U (en) | 1990-06-18 | 1990-06-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0422035U (en) |
-
1990
- 1990-06-18 JP JP6483990U patent/JPH0422035U/ja active Pending
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