JPS6431956A - Manufacture of stainless steel member for semiconductor-manufacturing equipment - Google Patents
Manufacture of stainless steel member for semiconductor-manufacturing equipmentInfo
- Publication number
- JPS6431956A JPS6431956A JP18567387A JP18567387A JPS6431956A JP S6431956 A JPS6431956 A JP S6431956A JP 18567387 A JP18567387 A JP 18567387A JP 18567387 A JP18567387 A JP 18567387A JP S6431956 A JPS6431956 A JP S6431956A
- Authority
- JP
- Japan
- Prior art keywords
- stainless steel
- steel member
- semiconductor
- manufacturing equipment
- internal surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185673A JP2517727B2 (ja) | 1987-07-25 | 1987-07-25 | 半導体製造装置用ステンレス鋼部材の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62185673A JP2517727B2 (ja) | 1987-07-25 | 1987-07-25 | 半導体製造装置用ステンレス鋼部材の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6431956A true JPS6431956A (en) | 1989-02-02 |
JP2517727B2 JP2517727B2 (ja) | 1996-07-24 |
Family
ID=16174868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62185673A Expired - Lifetime JP2517727B2 (ja) | 1987-07-25 | 1987-07-25 | 半導体製造装置用ステンレス鋼部材の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2517727B2 (ja) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6487760A (en) * | 1987-09-28 | 1989-03-31 | Kobe Steel Ltd | Stainless steel member for semiconductor producing device |
JPH02141566A (ja) * | 1988-11-21 | 1990-05-30 | Shinko Pantec Co Ltd | 超純水製造供給装置用機器配管材料 |
WO1992014858A1 (fr) * | 1991-02-18 | 1992-09-03 | Osaka Sanso Kogyo Kabushiki-Kaisha | Procede d'elaboration de film passive |
WO1992021786A1 (en) * | 1991-05-28 | 1992-12-10 | Osaka Sanso Kogyo Kabushiki-Kaisha | Process for forming passive film on stainless steel, and stainless steel and gas- and liquid-contacting part |
JPH0533118A (ja) * | 1991-07-25 | 1993-02-09 | Hitachi Zosen Corp | ステンレス鋼溶接部の防食方法 |
JPH0533117A (ja) * | 1991-07-25 | 1993-02-09 | Hitachi Zosen Corp | ステンレス鋼部材の表面処理方法 |
WO1993024267A1 (en) * | 1992-05-29 | 1993-12-09 | Osaka Sanso Kogyo Ltd. | Method of forming oxide passivation film at weld portion and process apparatus |
WO1993024268A1 (en) * | 1992-05-29 | 1993-12-09 | Osaka Sanso Kogyo Ltd. | Welding stainless material, process apparatus, ultra-pure water feeding apparatus, ultrahigh-pure gas feeding piping system, and welding method |
WO1994008065A1 (en) * | 1992-10-05 | 1994-04-14 | Tadahiro Ohmi | Method of forming oxide passivation film having chromium oxide layer on the surface thereof, and stainless steel having excellent corrosion resistance |
US5407492A (en) * | 1991-02-18 | 1995-04-18 | Osaka Sanso Kogyo Ltd. | Process for forming passivated film |
WO1995025184A1 (fr) * | 1994-03-16 | 1995-09-21 | Tadahiro Ohmi | Acier austenitique inoxydable destine a la formation d'une couche de passivation et son procede d'obtention |
US5456768A (en) * | 1993-05-07 | 1995-10-10 | Kabushiki Kaisha Kobe Seiko Sho | Surface treatment of stainless steel component for semiconductor manufacturing apparatus |
JPWO2005088185A1 (ja) * | 2004-03-10 | 2007-08-09 | 大見 忠弘 | ガス製造設備、ガス供給容器、及び電子装置製造用ガス |
US8671727B2 (en) * | 2009-12-21 | 2014-03-18 | Nippon Steel & Sumitomo Metal Corporation | Methods for producing blank tube for cold drawing and for producing cold drawn tube |
CN110249462A (zh) * | 2017-02-09 | 2019-09-17 | 杰富意钢铁株式会社 | 燃料电池的隔板用钢板的基材不锈钢板及其制造方法 |
SE2050141A1 (en) * | 2020-02-10 | 2021-03-30 | Ipco Sweden Ab | A method for surface treatment of a steel belt |
US11693321B2 (en) | 2016-03-31 | 2023-07-04 | Fujifilm Corporation | Treatment liquid for manufacturing semiconductor, storage container storing treatment liquid for manufacturing semiconductor, pattern forming method, and method of manufacturing electronic device |
-
1987
- 1987-07-25 JP JP62185673A patent/JP2517727B2/ja not_active Expired - Lifetime
Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6487760A (en) * | 1987-09-28 | 1989-03-31 | Kobe Steel Ltd | Stainless steel member for semiconductor producing device |
JPH02141566A (ja) * | 1988-11-21 | 1990-05-30 | Shinko Pantec Co Ltd | 超純水製造供給装置用機器配管材料 |
US5407492A (en) * | 1991-02-18 | 1995-04-18 | Osaka Sanso Kogyo Ltd. | Process for forming passivated film |
WO1992014858A1 (fr) * | 1991-02-18 | 1992-09-03 | Osaka Sanso Kogyo Kabushiki-Kaisha | Procede d'elaboration de film passive |
WO1992021786A1 (en) * | 1991-05-28 | 1992-12-10 | Osaka Sanso Kogyo Kabushiki-Kaisha | Process for forming passive film on stainless steel, and stainless steel and gas- and liquid-contacting part |
JPH0533117A (ja) * | 1991-07-25 | 1993-02-09 | Hitachi Zosen Corp | ステンレス鋼部材の表面処理方法 |
JPH0533118A (ja) * | 1991-07-25 | 1993-02-09 | Hitachi Zosen Corp | ステンレス鋼溶接部の防食方法 |
WO1993024267A1 (en) * | 1992-05-29 | 1993-12-09 | Osaka Sanso Kogyo Ltd. | Method of forming oxide passivation film at weld portion and process apparatus |
WO1993024268A1 (en) * | 1992-05-29 | 1993-12-09 | Osaka Sanso Kogyo Ltd. | Welding stainless material, process apparatus, ultra-pure water feeding apparatus, ultrahigh-pure gas feeding piping system, and welding method |
WO1994008065A1 (en) * | 1992-10-05 | 1994-04-14 | Tadahiro Ohmi | Method of forming oxide passivation film having chromium oxide layer on the surface thereof, and stainless steel having excellent corrosion resistance |
US6174610B1 (en) | 1992-10-05 | 2001-01-16 | Tadahiro Ohmi | Steel having excellent corrosion resistance and method of making the same |
US5656099A (en) * | 1992-10-05 | 1997-08-12 | Ohmi; Tadahiro | Method of forming oxide passivation film having chromium oxide layer on the surface thereof, and stainless steel having excellent corrosion resistance |
US5911841A (en) * | 1992-10-05 | 1999-06-15 | Ohmi; Tadahiro | Steel having excellent corrosion resistance |
US5456768A (en) * | 1993-05-07 | 1995-10-10 | Kabushiki Kaisha Kobe Seiko Sho | Surface treatment of stainless steel component for semiconductor manufacturing apparatus |
WO1995025184A1 (fr) * | 1994-03-16 | 1995-09-21 | Tadahiro Ohmi | Acier austenitique inoxydable destine a la formation d'une couche de passivation et son procede d'obtention |
JPWO2005088185A1 (ja) * | 2004-03-10 | 2007-08-09 | 大見 忠弘 | ガス製造設備、ガス供給容器、及び電子装置製造用ガス |
US8671727B2 (en) * | 2009-12-21 | 2014-03-18 | Nippon Steel & Sumitomo Metal Corporation | Methods for producing blank tube for cold drawing and for producing cold drawn tube |
US11693321B2 (en) | 2016-03-31 | 2023-07-04 | Fujifilm Corporation | Treatment liquid for manufacturing semiconductor, storage container storing treatment liquid for manufacturing semiconductor, pattern forming method, and method of manufacturing electronic device |
CN110249462A (zh) * | 2017-02-09 | 2019-09-17 | 杰富意钢铁株式会社 | 燃料电池的隔板用钢板的基材不锈钢板及其制造方法 |
US11380907B2 (en) | 2017-02-09 | 2022-07-05 | Jfe Steel Corporation | Substrate stainless steel sheet for fuel cell separators and production method therefor |
SE2050141A1 (en) * | 2020-02-10 | 2021-03-30 | Ipco Sweden Ab | A method for surface treatment of a steel belt |
SE543567C2 (en) * | 2020-02-10 | 2021-03-30 | Ipco Sweden Ab | A method for surface treatment of a steel belt |
WO2021162607A1 (en) * | 2020-02-10 | 2021-08-19 | Ipco Sweden Ab | A method for surface treatment of a steel belt |
Also Published As
Publication number | Publication date |
---|---|
JP2517727B2 (ja) | 1996-07-24 |
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