JPS6431418A - Charged particle beam lithography equipment - Google Patents

Charged particle beam lithography equipment

Info

Publication number
JPS6431418A
JPS6431418A JP18669987A JP18669987A JPS6431418A JP S6431418 A JPS6431418 A JP S6431418A JP 18669987 A JP18669987 A JP 18669987A JP 18669987 A JP18669987 A JP 18669987A JP S6431418 A JPS6431418 A JP S6431418A
Authority
JP
Japan
Prior art keywords
data
bit data
sent
cell
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18669987A
Other languages
English (en)
Inventor
Masayuki Maruo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP18669987A priority Critical patent/JPS6431418A/ja
Publication of JPS6431418A publication Critical patent/JPS6431418A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP18669987A 1987-07-28 1987-07-28 Charged particle beam lithography equipment Pending JPS6431418A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18669987A JPS6431418A (en) 1987-07-28 1987-07-28 Charged particle beam lithography equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18669987A JPS6431418A (en) 1987-07-28 1987-07-28 Charged particle beam lithography equipment

Publications (1)

Publication Number Publication Date
JPS6431418A true JPS6431418A (en) 1989-02-01

Family

ID=16193085

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18669987A Pending JPS6431418A (en) 1987-07-28 1987-07-28 Charged particle beam lithography equipment

Country Status (1)

Country Link
JP (1) JPS6431418A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5005138A (en) * 1989-04-20 1991-04-02 Mitsubishi Denki Kabushiki Kaisha Electron beam direct printing apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133632A (en) * 1981-02-12 1982-08-18 Jeol Ltd Electron beam exposing method
JPS5879720A (ja) * 1981-11-06 1983-05-13 Nippon Kogaku Kk <Nikon> パタ−ン描画装置
JPS58199526A (ja) * 1982-05-17 1983-11-19 Hitachi Ltd パタ−ン作成方法および装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133632A (en) * 1981-02-12 1982-08-18 Jeol Ltd Electron beam exposing method
JPS5879720A (ja) * 1981-11-06 1983-05-13 Nippon Kogaku Kk <Nikon> パタ−ン描画装置
JPS58199526A (ja) * 1982-05-17 1983-11-19 Hitachi Ltd パタ−ン作成方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5005138A (en) * 1989-04-20 1991-04-02 Mitsubishi Denki Kabushiki Kaisha Electron beam direct printing apparatus

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