JPS53134298A - Electron beam generator - Google Patents

Electron beam generator

Info

Publication number
JPS53134298A
JPS53134298A JP4887977A JP4887977A JPS53134298A JP S53134298 A JPS53134298 A JP S53134298A JP 4887977 A JP4887977 A JP 4887977A JP 4887977 A JP4887977 A JP 4887977A JP S53134298 A JPS53134298 A JP S53134298A
Authority
JP
Japan
Prior art keywords
electron beam
beam generator
anode
applying
electric potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4887977A
Other languages
Japanese (ja)
Inventor
Seiichi Tsukamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4887977A priority Critical patent/JPS53134298A/en
Publication of JPS53134298A publication Critical patent/JPS53134298A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To minimize the sizes and capacity of a power source for applying an electric potential between earth and anode, by disposing a shield electrode on the work side of the anode and applying an electric potential which is lower than that of the anode and which is somewhat higher than that of the work.
COPYRIGHT: (C)1978,JPO&Japio
JP4887977A 1977-04-26 1977-04-26 Electron beam generator Pending JPS53134298A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4887977A JPS53134298A (en) 1977-04-26 1977-04-26 Electron beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4887977A JPS53134298A (en) 1977-04-26 1977-04-26 Electron beam generator

Publications (1)

Publication Number Publication Date
JPS53134298A true JPS53134298A (en) 1978-11-22

Family

ID=12815564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4887977A Pending JPS53134298A (en) 1977-04-26 1977-04-26 Electron beam generator

Country Status (1)

Country Link
JP (1) JPS53134298A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019050141A (en) * 2017-09-11 2019-03-28 株式会社ニューフレアテクノロジー Charged particle device, charged particle lithography device and charged particle beam control method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019050141A (en) * 2017-09-11 2019-03-28 株式会社ニューフレアテクノロジー Charged particle device, charged particle lithography device and charged particle beam control method
US10998162B2 (en) 2017-09-11 2021-05-04 Nuflare Technology, Inc. Charged-particle beam apparatus, charged-particle beam writing apparatus, and charged-particle beam controlling method

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