JPS5479524A - Memory system - Google Patents

Memory system

Info

Publication number
JPS5479524A
JPS5479524A JP14677777A JP14677777A JPS5479524A JP S5479524 A JPS5479524 A JP S5479524A JP 14677777 A JP14677777 A JP 14677777A JP 14677777 A JP14677777 A JP 14677777A JP S5479524 A JPS5479524 A JP S5479524A
Authority
JP
Japan
Prior art keywords
information
substrate
memory
implanted
ions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14677777A
Other languages
Japanese (ja)
Inventor
Kazumichi Omura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14677777A priority Critical patent/JPS5479524A/en
Publication of JPS5479524A publication Critical patent/JPS5479524A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/23—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using electrostatic storage on a common layer, e.g. Forrester-Haeff tubes or William tubes

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To constitute a memory system which can superpose and store different information by storing information while making the desired element in the desired pattern on the surface of a substrate, by scanning on the surface by charged particle beams, and by reading out information over an energy analysis of generated X rays. CONSTITUTION:Memory substrate 1 employs a Si singel-crystal substrate and Al ions are implanted as large as fixed area at a fixed voltage via the mask previously supplied with required information. Next, As ions are implanted as large as fixed area at a fixed voltage via the mask stored with another information. In this way, the memory part is provided with four regions where no ion, either Al or As and both As and A are injected. To read information, deflective scanning on memory substrate 1 by electron beam 2 is done, and X ray 3 generated through the irradiation of this electron beam is detected by wavelength-dispersive X-ray spectroscope 4, thereby separating different information.
JP14677777A 1977-12-07 1977-12-07 Memory system Pending JPS5479524A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14677777A JPS5479524A (en) 1977-12-07 1977-12-07 Memory system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14677777A JPS5479524A (en) 1977-12-07 1977-12-07 Memory system

Publications (1)

Publication Number Publication Date
JPS5479524A true JPS5479524A (en) 1979-06-25

Family

ID=15415292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14677777A Pending JPS5479524A (en) 1977-12-07 1977-12-07 Memory system

Country Status (1)

Country Link
JP (1) JPS5479524A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735202A (en) * 1980-08-11 1982-02-25 Mitsubishi Heavy Ind Ltd Boiler plant

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5735202A (en) * 1980-08-11 1982-02-25 Mitsubishi Heavy Ind Ltd Boiler plant
JPS6239321B2 (en) * 1980-08-11 1987-08-22 Mitsubishi Heavy Ind Ltd

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