JPS6431110A - Automatic focusing method for microscope - Google Patents
Automatic focusing method for microscopeInfo
- Publication number
- JPS6431110A JPS6431110A JP18705787A JP18705787A JPS6431110A JP S6431110 A JPS6431110 A JP S6431110A JP 18705787 A JP18705787 A JP 18705787A JP 18705787 A JP18705787 A JP 18705787A JP S6431110 A JPS6431110 A JP S6431110A
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- peak
- point
- microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Microscoopes, Condenser (AREA)
- Automatic Focus Adjustment (AREA)
Abstract
PURPOSE:To perform focusing automatically with high accuracy without using any complex mechanism by light-receiving light which is reflected on a body to be inspected by a light receiving fiber and detecting the point where the received light quantity of the light receiving fiber is maximum. CONSTITUTION:A stepping motor is driven with a control signal from a control part 30 to move up and down the body 10 to be inspected. At the same time, a projection fiber 20a emits light on the body 10 to be inspected and the quantity of light reflected by the body 10 is measured. The quantity of light received by the light receiving fiber 20b is expressed by a curve having one peak, but the digital value of the quantity of light is integrated by an arithmetic part 30 and the peak position is determined so as to determine the peak position with good reproducibility. Then front and rear integral values which are divided by the peak point are equal to each other, which is utilized to position the body 10 at the point where the difference between the integral values becomes 0, thereby accurately focusing a microscope. Consequently, the constitution of an optical system is simple and automatic focusing is possible up to a high- magnification range.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18705787A JPS6431110A (en) | 1987-07-27 | 1987-07-27 | Automatic focusing method for microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18705787A JPS6431110A (en) | 1987-07-27 | 1987-07-27 | Automatic focusing method for microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6431110A true JPS6431110A (en) | 1989-02-01 |
Family
ID=16199415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18705787A Pending JPS6431110A (en) | 1987-07-27 | 1987-07-27 | Automatic focusing method for microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6431110A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6239905B1 (en) * | 1997-08-27 | 2001-05-29 | Nikon Corporation | Inverted microscope |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5312193A (en) * | 1976-07-20 | 1978-02-03 | Olympus Optical Co | Device for automatically focusing endscope |
JPS5328403A (en) * | 1976-08-28 | 1978-03-16 | Olympus Optical Co Ltd | Optical information reader of disc from magnetic recording media |
-
1987
- 1987-07-27 JP JP18705787A patent/JPS6431110A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5312193A (en) * | 1976-07-20 | 1978-02-03 | Olympus Optical Co | Device for automatically focusing endscope |
JPS5328403A (en) * | 1976-08-28 | 1978-03-16 | Olympus Optical Co Ltd | Optical information reader of disc from magnetic recording media |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6239905B1 (en) * | 1997-08-27 | 2001-05-29 | Nikon Corporation | Inverted microscope |
US6404546B2 (en) * | 1997-08-27 | 2002-06-11 | Nikon Corporation | Inverted microscope |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6466565A (en) | Voltage detection | |
EP0250354A3 (en) | Apparatus and method for determining position with light | |
JPS6412204A (en) | Optical ic interferometer | |
SU1327801A3 (en) | Device for measuring light transmission | |
CN1268897C (en) | Distance-measuring device using pulse electromagnetic wave, and method thereof | |
JPS6431110A (en) | Automatic focusing method for microscope | |
JPS5745254A (en) | Automatic detector for amount of silicon wafer worked | |
JPS6421728A (en) | Optical head | |
JPS5760239A (en) | Pressure sensor | |
US4487503A (en) | Refractometer using the limiting angle method | |
JPS6412542A (en) | Parallel tester | |
SU504139A1 (en) | The method of controlling the parameters of liquids | |
JPS5471652A (en) | Automatic dimmer for microscope light source | |
JPS6479637A (en) | Detection of position of defect and of open end of optical fiber | |
JPS57211507A (en) | Measuring method for distance | |
JPS6488303A (en) | Position detecting device | |
JPS5651646A (en) | Toner concentration sensor | |
JPS57204503A (en) | Automatic focusing system | |
SU972293A1 (en) | Optical electronic device for automatic lens centering | |
JPS63314401A (en) | Processing method of signal of received light in range finding optical fiber sensor | |
JPS5714815A (en) | Optical microscopic device | |
JPS57128807A (en) | Method and apparatus for measuring out of roundness of circular sample | |
SU496534A1 (en) | A method for automatically adjusting the steepness of the characteristics of photo sensors | |
SU930215A1 (en) | Device for measuring photodetector time constant | |
JPS56107149A (en) | Densitometer |