JPS6430685A - Fleon washer - Google Patents

Fleon washer

Info

Publication number
JPS6430685A
JPS6430685A JP18596087A JP18596087A JPS6430685A JP S6430685 A JPS6430685 A JP S6430685A JP 18596087 A JP18596087 A JP 18596087A JP 18596087 A JP18596087 A JP 18596087A JP S6430685 A JPS6430685 A JP S6430685A
Authority
JP
Japan
Prior art keywords
fluorocarbon
vapor
gas
work
fluorocarbon vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18596087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438466B2 (enrdf_load_stackoverflow
Inventor
Toshio Horimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OTSUKA GIKEN KOGYO KK
Original Assignee
OTSUKA GIKEN KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OTSUKA GIKEN KOGYO KK filed Critical OTSUKA GIKEN KOGYO KK
Priority to JP18596087A priority Critical patent/JPS6430685A/ja
Publication of JPS6430685A publication Critical patent/JPS6430685A/ja
Publication of JPH0438466B2 publication Critical patent/JPH0438466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP18596087A 1987-07-24 1987-07-24 Fleon washer Granted JPS6430685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18596087A JPS6430685A (en) 1987-07-24 1987-07-24 Fleon washer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18596087A JPS6430685A (en) 1987-07-24 1987-07-24 Fleon washer

Publications (2)

Publication Number Publication Date
JPS6430685A true JPS6430685A (en) 1989-02-01
JPH0438466B2 JPH0438466B2 (enrdf_load_stackoverflow) 1992-06-24

Family

ID=16179889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18596087A Granted JPS6430685A (en) 1987-07-24 1987-07-24 Fleon washer

Country Status (1)

Country Link
JP (1) JPS6430685A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05144796A (ja) * 1991-11-20 1993-06-11 Nec Yamaguchi Ltd 洗浄装置
CN103084352A (zh) * 2012-12-10 2013-05-08 北海保通冷冻食品有限公司 一种清洗装置
JP6979244B1 (ja) * 2021-05-21 2021-12-08 ジャパン・フィールド株式会社 洗浄装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7645751B2 (ja) 2021-09-03 2025-03-14 オークマ株式会社 工作機械の精度分析システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184336A (ja) * 1987-01-26 1988-07-29 Nec Corp 洗浄装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184336A (ja) * 1987-01-26 1988-07-29 Nec Corp 洗浄装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05144796A (ja) * 1991-11-20 1993-06-11 Nec Yamaguchi Ltd 洗浄装置
CN103084352A (zh) * 2012-12-10 2013-05-08 北海保通冷冻食品有限公司 一种清洗装置
JP6979244B1 (ja) * 2021-05-21 2021-12-08 ジャパン・フィールド株式会社 洗浄装置

Also Published As

Publication number Publication date
JPH0438466B2 (enrdf_load_stackoverflow) 1992-06-24

Similar Documents

Publication Publication Date Title
US5102504A (en) Device for solvent recovery in an ultrasonic cleaning device
JPH01121672A (ja) 冷却装置から露水を取り除くための装置
JPS6430685A (en) Fleon washer
US4895176A (en) Chloro-fluoro-carbon cleaning apparatus
US2816065A (en) Vapor degreaser
US5307643A (en) Method and apparatus for controlling refrigerant gas in a low pressure refrigeration system
KR20180121800A (ko) 진공 세척기
CN205337141U (zh) 一种羊奶脱膻机
CN205270208U (zh) 工件清洗设备
US5253523A (en) Absorption type chiller
US4822429A (en) Liquid circulating means for a vapor generating and recovery apparatus
US1806712A (en) Cooling system foe
US3299653A (en) Refrigeration system
JPH01270903A (ja) 有機溶剤を用いる洗浄装置に於ける有機溶剤蒸気の回収方法
KR200240531Y1 (ko) 기액분리기 및 냉각액 순환장치가 일체로 구비된 농축장치 시스템
JPH1157637A (ja) 洗浄装置
SU1692687A1 (ru) Способ очистки трубопроводов
JPH0434881Y2 (enrdf_load_stackoverflow)
KR0180599B1 (ko) 흡수식 냉,온수기
KR950012004A (ko) 냉매회로의 세정장치 및 방법
JPH04187972A (ja) 液体冷却装置
JPH02233190A (ja) 超音波洗浄、バリ取り装置
SU841464A1 (ru) Холодильна установка
JPH0429904Y2 (enrdf_load_stackoverflow)
JPH06178912A (ja) 溶剤気体の吸引方法及びそれを用いた溶剤回収装置