JPS6430685A - Fleon washer - Google Patents

Fleon washer

Info

Publication number
JPS6430685A
JPS6430685A JP18596087A JP18596087A JPS6430685A JP S6430685 A JPS6430685 A JP S6430685A JP 18596087 A JP18596087 A JP 18596087A JP 18596087 A JP18596087 A JP 18596087A JP S6430685 A JPS6430685 A JP S6430685A
Authority
JP
Japan
Prior art keywords
fluorocarbon
vapor
gas
work
fluorocarbon vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18596087A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0438466B2 (enrdf_load_stackoverflow
Inventor
Toshio Horimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OTSUKA GIKEN KOGYO KK
Original Assignee
OTSUKA GIKEN KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OTSUKA GIKEN KOGYO KK filed Critical OTSUKA GIKEN KOGYO KK
Priority to JP18596087A priority Critical patent/JPS6430685A/ja
Publication of JPS6430685A publication Critical patent/JPS6430685A/ja
Publication of JPH0438466B2 publication Critical patent/JPH0438466B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Coating Apparatus (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP18596087A 1987-07-24 1987-07-24 Fleon washer Granted JPS6430685A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18596087A JPS6430685A (en) 1987-07-24 1987-07-24 Fleon washer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18596087A JPS6430685A (en) 1987-07-24 1987-07-24 Fleon washer

Publications (2)

Publication Number Publication Date
JPS6430685A true JPS6430685A (en) 1989-02-01
JPH0438466B2 JPH0438466B2 (enrdf_load_stackoverflow) 1992-06-24

Family

ID=16179889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18596087A Granted JPS6430685A (en) 1987-07-24 1987-07-24 Fleon washer

Country Status (1)

Country Link
JP (1) JPS6430685A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05144796A (ja) * 1991-11-20 1993-06-11 Nec Yamaguchi Ltd 洗浄装置
CN103084352A (zh) * 2012-12-10 2013-05-08 北海保通冷冻食品有限公司 一种清洗装置
JP6979244B1 (ja) * 2021-05-21 2021-12-08 ジャパン・フィールド株式会社 洗浄装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7645751B2 (ja) 2021-09-03 2025-03-14 オークマ株式会社 工作機械の精度分析システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184336A (ja) * 1987-01-26 1988-07-29 Nec Corp 洗浄装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63184336A (ja) * 1987-01-26 1988-07-29 Nec Corp 洗浄装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05144796A (ja) * 1991-11-20 1993-06-11 Nec Yamaguchi Ltd 洗浄装置
CN103084352A (zh) * 2012-12-10 2013-05-08 北海保通冷冻食品有限公司 一种清洗装置
JP6979244B1 (ja) * 2021-05-21 2021-12-08 ジャパン・フィールド株式会社 洗浄装置

Also Published As

Publication number Publication date
JPH0438466B2 (enrdf_load_stackoverflow) 1992-06-24

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