JPS6429894U - - Google Patents
Info
- Publication number
- JPS6429894U JPS6429894U JP12498387U JP12498387U JPS6429894U JP S6429894 U JPS6429894 U JP S6429894U JP 12498387 U JP12498387 U JP 12498387U JP 12498387 U JP12498387 U JP 12498387U JP S6429894 U JPS6429894 U JP S6429894U
- Authority
- JP
- Japan
- Prior art keywords
- electronic
- electronic device
- gas
- substrates
- gas header
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims 4
Landscapes
- Cooling Or The Like Of Electrical Apparatus (AREA)
- Rolls And Other Rotary Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12498387U JPS6429894U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-17 | 1987-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12498387U JPS6429894U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-17 | 1987-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6429894U true JPS6429894U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-22 |
Family
ID=31375185
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12498387U Pending JPS6429894U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-08-17 | 1987-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6429894U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-08-17 JP JP12498387U patent/JPS6429894U/ja active Pending
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