JPS6428376A - Production of silicon dioxide film containing boron - Google Patents

Production of silicon dioxide film containing boron

Info

Publication number
JPS6428376A
JPS6428376A JP18317987A JP18317987A JPS6428376A JP S6428376 A JPS6428376 A JP S6428376A JP 18317987 A JP18317987 A JP 18317987A JP 18317987 A JP18317987 A JP 18317987A JP S6428376 A JPS6428376 A JP S6428376A
Authority
JP
Japan
Prior art keywords
silicon dioxide
dioxide film
soln
base material
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18317987A
Other languages
English (en)
Inventor
Takuji Aida
Akimitsu Hishinuma
Hirotsugu Nagayama
Hideo Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Priority to JP18317987A priority Critical patent/JPS6428376A/ja
Publication of JPS6428376A publication Critical patent/JPS6428376A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Chemically Coating (AREA)
JP18317987A 1987-07-22 1987-07-22 Production of silicon dioxide film containing boron Pending JPS6428376A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18317987A JPS6428376A (en) 1987-07-22 1987-07-22 Production of silicon dioxide film containing boron

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18317987A JPS6428376A (en) 1987-07-22 1987-07-22 Production of silicon dioxide film containing boron

Publications (1)

Publication Number Publication Date
JPS6428376A true JPS6428376A (en) 1989-01-30

Family

ID=16131156

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18317987A Pending JPS6428376A (en) 1987-07-22 1987-07-22 Production of silicon dioxide film containing boron

Country Status (1)

Country Link
JP (1) JPS6428376A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0782975A1 (en) * 1996-01-04 1997-07-09 Ppg Industries, Inc. Reduction of haze in transparent coatings
JP2001158621A (ja) * 1999-11-29 2001-06-12 Stanley Electric Co Ltd 液相での被膜の形成方法
JP2007332448A (ja) * 2006-06-19 2007-12-27 Seiko Epson Corp 薄膜形成装置及び薄膜形成方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196744A (en) * 1981-05-29 1982-12-02 Nippon Sheet Glass Co Ltd Surface treatment of glass containing alkali metal
JPS62162628A (ja) * 1986-01-14 1987-07-18 Nippon Sheet Glass Co Ltd 非晶質薄膜の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57196744A (en) * 1981-05-29 1982-12-02 Nippon Sheet Glass Co Ltd Surface treatment of glass containing alkali metal
JPS62162628A (ja) * 1986-01-14 1987-07-18 Nippon Sheet Glass Co Ltd 非晶質薄膜の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0782975A1 (en) * 1996-01-04 1997-07-09 Ppg Industries, Inc. Reduction of haze in transparent coatings
JP2001158621A (ja) * 1999-11-29 2001-06-12 Stanley Electric Co Ltd 液相での被膜の形成方法
JP2007332448A (ja) * 2006-06-19 2007-12-27 Seiko Epson Corp 薄膜形成装置及び薄膜形成方法

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