JPS6428240A - Optical quartz glass member - Google Patents

Optical quartz glass member

Info

Publication number
JPS6428240A
JPS6428240A JP62180927A JP18092787A JPS6428240A JP S6428240 A JPS6428240 A JP S6428240A JP 62180927 A JP62180927 A JP 62180927A JP 18092787 A JP18092787 A JP 18092787A JP S6428240 A JPS6428240 A JP S6428240A
Authority
JP
Japan
Prior art keywords
quartz glass
ingot
glass member
afford
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62180927A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0535688B2 (https=
Inventor
Tatsumasa Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Quartz Products Co Ltd
Original Assignee
Shin Etsu Quartz Products Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Quartz Products Co Ltd filed Critical Shin Etsu Quartz Products Co Ltd
Priority to JP62180927A priority Critical patent/JPS6428240A/ja
Publication of JPS6428240A publication Critical patent/JPS6428240A/ja
Publication of JPH0535688B2 publication Critical patent/JPH0535688B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1469—Means for changing or stabilising the shape or form of the shaped article or deposit
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1453—Thermal after-treatment of the shaped article, e.g. dehydrating, consolidating, sintering
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2203/00—Fibre product details, e.g. structure, shape
    • C03B2203/10—Internal structure or shape details
    • C03B2203/22—Radial profile of refractive index, composition or softening point

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP62180927A 1987-07-22 1987-07-22 Optical quartz glass member Granted JPS6428240A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62180927A JPS6428240A (en) 1987-07-22 1987-07-22 Optical quartz glass member

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62180927A JPS6428240A (en) 1987-07-22 1987-07-22 Optical quartz glass member

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP6180500A Division JP2639514B2 (ja) 1994-07-11 1994-07-11 レーザリソグラフィ装置

Publications (2)

Publication Number Publication Date
JPS6428240A true JPS6428240A (en) 1989-01-30
JPH0535688B2 JPH0535688B2 (https=) 1993-05-27

Family

ID=16091712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62180927A Granted JPS6428240A (en) 1987-07-22 1987-07-22 Optical quartz glass member

Country Status (1)

Country Link
JP (1) JPS6428240A (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0388742A (ja) * 1989-06-09 1991-04-15 Shinetsu Sekiei Kk 合成シリカガラス光学体及びその製造方法
US5719698A (en) * 1993-02-10 1998-02-17 Nikon Corporation Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
JP2004339050A (ja) * 2003-04-26 2004-12-02 Carl-Zeiss-Stiftung ドープ石英ガラスのガラス体を製造するための火炎加水分解法
WO2004078663A3 (en) * 2003-03-06 2005-06-30 Heraeus Quarzglas Optical synthetic quartz glass and method for producing the same
WO2006088236A1 (en) * 2005-02-18 2006-08-24 Asahi Glass Co., Ltd. Process for producing synthetic quartz glass, jig for synthetic-quartz-glass production, and synthetic quartz glass for optical member

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6039535A (ja) * 1983-08-12 1985-03-01 Toshiba Ceramics Co Ltd 石英ガラスの選別方法
JPS6134668A (ja) * 1984-07-27 1986-02-18 Casio Comput Co Ltd 仮名漢字変換処理方式
JPS6145824A (ja) * 1984-08-01 1986-03-05 Nippon Kiki Kogyo Kk 荷扱い装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6039535A (ja) * 1983-08-12 1985-03-01 Toshiba Ceramics Co Ltd 石英ガラスの選別方法
JPS6134668A (ja) * 1984-07-27 1986-02-18 Casio Comput Co Ltd 仮名漢字変換処理方式
JPS6145824A (ja) * 1984-08-01 1986-03-05 Nippon Kiki Kogyo Kk 荷扱い装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0388742A (ja) * 1989-06-09 1991-04-15 Shinetsu Sekiei Kk 合成シリカガラス光学体及びその製造方法
US5719698A (en) * 1993-02-10 1998-02-17 Nikon Corporation Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
WO2004078663A3 (en) * 2003-03-06 2005-06-30 Heraeus Quarzglas Optical synthetic quartz glass and method for producing the same
US7312170B2 (en) 2003-03-06 2007-12-25 Heraeus Quarzglas Gmbh & Co. Kg Optical synthetic quartz glass and method for producing the same
JP2004339050A (ja) * 2003-04-26 2004-12-02 Carl-Zeiss-Stiftung ドープ石英ガラスのガラス体を製造するための火炎加水分解法
WO2006088236A1 (en) * 2005-02-18 2006-08-24 Asahi Glass Co., Ltd. Process for producing synthetic quartz glass, jig for synthetic-quartz-glass production, and synthetic quartz glass for optical member
US7992413B2 (en) 2005-02-18 2011-08-09 Asahi Glass Company, Limited Process for producing synthetic quartz glass

Also Published As

Publication number Publication date
JPH0535688B2 (https=) 1993-05-27

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