JPS6426182U - - Google Patents

Info

Publication number
JPS6426182U
JPS6426182U JP12049887U JP12049887U JPS6426182U JP S6426182 U JPS6426182 U JP S6426182U JP 12049887 U JP12049887 U JP 12049887U JP 12049887 U JP12049887 U JP 12049887U JP S6426182 U JPS6426182 U JP S6426182U
Authority
JP
Japan
Prior art keywords
finger
robot arm
attachment device
rack
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12049887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH085033Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987120498U priority Critical patent/JPH085033Y2/ja
Publication of JPS6426182U publication Critical patent/JPS6426182U/ja
Application granted granted Critical
Publication of JPH085033Y2 publication Critical patent/JPH085033Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987120498U 1987-08-07 1987-08-07 フインガ取付装置 Expired - Lifetime JPH085033Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987120498U JPH085033Y2 (ja) 1987-08-07 1987-08-07 フインガ取付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987120498U JPH085033Y2 (ja) 1987-08-07 1987-08-07 フインガ取付装置

Publications (2)

Publication Number Publication Date
JPS6426182U true JPS6426182U (OSRAM) 1989-02-14
JPH085033Y2 JPH085033Y2 (ja) 1996-02-14

Family

ID=31366662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987120498U Expired - Lifetime JPH085033Y2 (ja) 1987-08-07 1987-08-07 フインガ取付装置

Country Status (1)

Country Link
JP (1) JPH085033Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006120799A (ja) * 2004-10-20 2006-05-11 Tokyo Electron Ltd 基板処理装置、基板載置台交換方法、及びプログラム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021122864A (ja) * 2020-01-31 2021-08-30 コニカミノルタ株式会社 物体把持装置、物体把持装置の制御方法及び制御プログラム

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136292U (ja) * 1983-03-01 1984-09-11 株式会社安川電機 産業用ロボツトの加工具取付装置
JPS60155387A (ja) * 1983-12-29 1985-08-15 ルーデイ・キルスト ロボツト若しくは操作装置のグリツパを自動的に交換及び連結するための装置
JPS60249585A (ja) * 1984-05-23 1985-12-10 三菱電機株式会社 産業用ロボツト装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59136292U (ja) * 1983-03-01 1984-09-11 株式会社安川電機 産業用ロボツトの加工具取付装置
JPS60155387A (ja) * 1983-12-29 1985-08-15 ルーデイ・キルスト ロボツト若しくは操作装置のグリツパを自動的に交換及び連結するための装置
JPS60249585A (ja) * 1984-05-23 1985-12-10 三菱電機株式会社 産業用ロボツト装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006120799A (ja) * 2004-10-20 2006-05-11 Tokyo Electron Ltd 基板処理装置、基板載置台交換方法、及びプログラム

Also Published As

Publication number Publication date
JPH085033Y2 (ja) 1996-02-14

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