JPS6425483A - Manufacture of nonvolatile memory - Google Patents

Manufacture of nonvolatile memory

Info

Publication number
JPS6425483A
JPS6425483A JP18207887A JP18207887A JPS6425483A JP S6425483 A JPS6425483 A JP S6425483A JP 18207887 A JP18207887 A JP 18207887A JP 18207887 A JP18207887 A JP 18207887A JP S6425483 A JPS6425483 A JP S6425483A
Authority
JP
Japan
Prior art keywords
film
antioxide
sidewall
region
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18207887A
Other languages
English (en)
Inventor
Shoji Okabe
Takashi Toida
Toshiyuki Kishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Watch Co Ltd
Original Assignee
Citizen Watch Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Citizen Watch Co Ltd filed Critical Citizen Watch Co Ltd
Priority to JP18207887A priority Critical patent/JPS6425483A/ja
Publication of JPS6425483A publication Critical patent/JPS6425483A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Volatile Memory (AREA)
JP18207887A 1987-07-21 1987-07-21 Manufacture of nonvolatile memory Pending JPS6425483A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18207887A JPS6425483A (en) 1987-07-21 1987-07-21 Manufacture of nonvolatile memory

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18207887A JPS6425483A (en) 1987-07-21 1987-07-21 Manufacture of nonvolatile memory

Publications (1)

Publication Number Publication Date
JPS6425483A true JPS6425483A (en) 1989-01-27

Family

ID=16111964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18207887A Pending JPS6425483A (en) 1987-07-21 1987-07-21 Manufacture of nonvolatile memory

Country Status (1)

Country Link
JP (1) JPS6425483A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7951679B2 (en) 2004-08-16 2011-05-31 Panasonic Corporation Method for fabricating semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7951679B2 (en) 2004-08-16 2011-05-31 Panasonic Corporation Method for fabricating semiconductor device

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