JPS6425441A - Semiconductor integrated circuit device - Google Patents
Semiconductor integrated circuit deviceInfo
- Publication number
- JPS6425441A JPS6425441A JP62181460A JP18146087A JPS6425441A JP S6425441 A JPS6425441 A JP S6425441A JP 62181460 A JP62181460 A JP 62181460A JP 18146087 A JP18146087 A JP 18146087A JP S6425441 A JPS6425441 A JP S6425441A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- bump
- preliminary
- bumps
- floating state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01005—Boron [B]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To accurately measure the potential of an internal circuit by providing a preliminary bump in a floating state on a semiconductor chip. CONSTITUTION:Many bumps 2 provided on a whole semiconductor chip 1 are connected to an internal circuit of an LSI through aluminum wirings. Preliminary bumps 2a provided at the four corners of the chip 1 are in an electrically floating state. Preliminary wirings 3, 4 made of aluminum films are in an electrically floating state. Probe styluses 28 are stood on all the bumps 2, 2a to measure the potentials of improper positions. As a result that the probe inspection of the LSI is performed, assume that the improper positions (x) of the circuit are discovered. The positions (x) are connected to the wiring 3 of shortest distance thereto through connecting wirings 29a. The wiring 3 is connected to the bump 2a through wiring 29b. Thus, the improper position is connected to the bump 2a.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62181460A JPS6425441A (en) | 1987-07-21 | 1987-07-21 | Semiconductor integrated circuit device |
EP19880305199 EP0295065A3 (en) | 1987-06-10 | 1988-06-08 | Semiconductor integrated circuit device, method of making same or cutting method for same, and cutting system using energy beam for same |
US07/584,180 US6753253B1 (en) | 1986-06-18 | 1990-09-18 | Method of making wiring and logic corrections on a semiconductor device by use of focused ion beams |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62181460A JPS6425441A (en) | 1987-07-21 | 1987-07-21 | Semiconductor integrated circuit device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6425441A true JPS6425441A (en) | 1989-01-27 |
Family
ID=16101144
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62181460A Pending JPS6425441A (en) | 1986-06-18 | 1987-07-21 | Semiconductor integrated circuit device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6425441A (en) |
-
1987
- 1987-07-21 JP JP62181460A patent/JPS6425441A/en active Pending
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