JPS6424832U - - Google Patents
Info
- Publication number
- JPS6424832U JPS6424832U JP11942787U JP11942787U JPS6424832U JP S6424832 U JPS6424832 U JP S6424832U JP 11942787 U JP11942787 U JP 11942787U JP 11942787 U JP11942787 U JP 11942787U JP S6424832 U JPS6424832 U JP S6424832U
- Authority
- JP
- Japan
- Prior art keywords
- passage
- top plate
- immersed
- wafer
- cleaning liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 4
- 238000007599 discharging Methods 0.000 claims 1
Landscapes
- Drying Of Solid Materials (AREA)
Description
図は本考案乾燥装置の一実施例を示し、第１図
は一部破断した正面図、第２図は第１図の側断面
図である。
１……液槽、２……清浄液、３……ウエハ、４
……キヤリア、５……天板、６……通過口、７…
…押上げ部材、９……吐出ノズル。
The drawings show an embodiment of the drying apparatus of the present invention, in which FIG. 1 is a partially cutaway front view, and FIG. 2 is a side sectional view of FIG. 1. 1...Liquid tank, 2...Cleaning liquid, 3...Wafer, 4
...Carrier, 5...Top plate, 6...Passing port, 7...
...Push-up member, 9...Discharge nozzle.
Claims (1)
に浸漬した状態で収納する液槽と、該液槽の上部
を覆う天板と、該天板に開設され上記ウエハが通
過可能な通過口と、該通過口から上記清浄液中に
浸漬したウエハを通過せしめる通過手段と、上記
通過口の出口近傍に乾燥気体を吐出する吐出手段
と、からなるウエハ乾燥装置。 a liquid tank that stores a plurality of wafers held in a carrier while immersed in a cleaning liquid; a top plate that covers the top of the liquid tank; and a passage opening provided in the top plate through which the wafers can pass; A wafer drying apparatus comprising: a passage means for passing a wafer immersed in the cleaning liquid through the passage port; and a discharge means for discharging drying gas near the exit of the passage port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11942787U JPS6424832U (en) | 1987-08-04 | 1987-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11942787U JPS6424832U (en) | 1987-08-04 | 1987-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6424832U true JPS6424832U (en) | 1989-02-10 |
Family
ID=31364647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11942787U Pending JPS6424832U (en) | 1987-08-04 | 1987-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6424832U (en) |
-
1987
- 1987-08-04 JP JP11942787U patent/JPS6424832U/ja active Pending
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