JPS62147453U - - Google Patents
Info
- Publication number
- JPS62147453U JPS62147453U JP1986035615U JP3561586U JPS62147453U JP S62147453 U JPS62147453 U JP S62147453U JP 1986035615 U JP1986035615 U JP 1986035615U JP 3561586 U JP3561586 U JP 3561586U JP S62147453 U JPS62147453 U JP S62147453U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- liquid
- substrate
- supply port
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Description
第１図は本考案の基板洗浄装置の一実施例を示
す断面図、第２図は従来の基板剥離方法を説明す
る断面図である。
１…ホルダー、２…マウンテイングアセンブリ
、２１…マウンテイングマテリアル、２２…テン
プレート、３…基板、４…洗浄タンク、５…給液
口、６…排出口、７…保持部材、８…ピンセツト
。
FIG. 1 is a sectional view showing an embodiment of the substrate cleaning apparatus of the present invention, and FIG. 2 is a sectional view illustrating a conventional substrate peeling method. DESCRIPTION OF SYMBOLS 1... Holder, 2... Mounting assembly, 21... Mounting material, 22... Template, 3... Substrate, 4... Cleaning tank, 5... Liquid supply port, 6... Discharge port, 7... Holding member, 8... Tweezers.
Claims (1)
持するウエハマウンテイングアセンブリをその基
板の保持された面を下向きに設置し、中心部から
上向きに洗浄液を噴出させる給液口と底面に洗浄
液の排出口とを持つ洗浄タンクと、このタンク内
の前記給液口より少し下方に保持されて前記洗浄
液を通す網状保持部材とを備えたことを特徴とす
る基板洗浄装置。 The wafer mounting assembly, which holds a substrate in a holder using the surface tension of the liquid, is installed with the surface holding the substrate facing downward, and there is a liquid supply port that spouts cleaning liquid upward from the center, and a cleaning liquid discharge port on the bottom. 1. A substrate cleaning apparatus comprising: a cleaning tank having an outlet; and a net-like holding member held slightly below the liquid supply port in the tank and through which the cleaning liquid passes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986035615U JPS62147453U (en) | 1986-03-11 | 1986-03-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986035615U JPS62147453U (en) | 1986-03-11 | 1986-03-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62147453U true JPS62147453U (en) | 1987-09-17 |
Family
ID=30845265
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986035615U Pending JPS62147453U (en) | 1986-03-11 | 1986-03-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62147453U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05243198A (en) * | 1992-02-27 | 1993-09-21 | Nec Corp | Semiconductor element separating and cleaning jig |
-
1986
- 1986-03-11 JP JP1986035615U patent/JPS62147453U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05243198A (en) * | 1992-02-27 | 1993-09-21 | Nec Corp | Semiconductor element separating and cleaning jig |
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