JPS642437Y2 - - Google Patents

Info

Publication number
JPS642437Y2
JPS642437Y2 JP1987031986U JP3198687U JPS642437Y2 JP S642437 Y2 JPS642437 Y2 JP S642437Y2 JP 1987031986 U JP1987031986 U JP 1987031986U JP 3198687 U JP3198687 U JP 3198687U JP S642437 Y2 JPS642437 Y2 JP S642437Y2
Authority
JP
Japan
Prior art keywords
source unit
evaporation source
substrate
electron gun
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987031986U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62147334U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987031986U priority Critical patent/JPS642437Y2/ja
Publication of JPS62147334U publication Critical patent/JPS62147334U/ja
Application granted granted Critical
Publication of JPS642437Y2 publication Critical patent/JPS642437Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1987031986U 1987-03-06 1987-03-06 Expired JPS642437Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987031986U JPS642437Y2 (enExample) 1987-03-06 1987-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987031986U JPS642437Y2 (enExample) 1987-03-06 1987-03-06

Publications (2)

Publication Number Publication Date
JPS62147334U JPS62147334U (enExample) 1987-09-17
JPS642437Y2 true JPS642437Y2 (enExample) 1989-01-20

Family

ID=30838233

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987031986U Expired JPS642437Y2 (enExample) 1987-03-06 1987-03-06

Country Status (1)

Country Link
JP (1) JPS642437Y2 (enExample)

Also Published As

Publication number Publication date
JPS62147334U (enExample) 1987-09-17

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