JPS6422025U - - Google Patents

Info

Publication number
JPS6422025U
JPS6422025U JP11740687U JP11740687U JPS6422025U JP S6422025 U JPS6422025 U JP S6422025U JP 11740687 U JP11740687 U JP 11740687U JP 11740687 U JP11740687 U JP 11740687U JP S6422025 U JPS6422025 U JP S6422025U
Authority
JP
Japan
Prior art keywords
work coil
chamber
susceptor
wafer
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11740687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521867Y2 (US20100056889A1-20100304-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11740687U priority Critical patent/JPH0521867Y2/ja
Publication of JPS6422025U publication Critical patent/JPS6422025U/ja
Application granted granted Critical
Publication of JPH0521867Y2 publication Critical patent/JPH0521867Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP11740687U 1987-07-29 1987-07-29 Expired - Lifetime JPH0521867Y2 (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11740687U JPH0521867Y2 (US20100056889A1-20100304-C00004.png) 1987-07-29 1987-07-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11740687U JPH0521867Y2 (US20100056889A1-20100304-C00004.png) 1987-07-29 1987-07-29

Publications (2)

Publication Number Publication Date
JPS6422025U true JPS6422025U (US20100056889A1-20100304-C00004.png) 1989-02-03
JPH0521867Y2 JPH0521867Y2 (US20100056889A1-20100304-C00004.png) 1993-06-04

Family

ID=31360840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11740687U Expired - Lifetime JPH0521867Y2 (US20100056889A1-20100304-C00004.png) 1987-07-29 1987-07-29

Country Status (1)

Country Link
JP (1) JPH0521867Y2 (US20100056889A1-20100304-C00004.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001019590A (ja) * 1999-07-06 2001-01-23 Sony Corp 気相成長装置
JP2001118837A (ja) * 1992-09-07 2001-04-27 Mitsubishi Electric Corp 半導体製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001118837A (ja) * 1992-09-07 2001-04-27 Mitsubishi Electric Corp 半導体製造装置
JP2001019590A (ja) * 1999-07-06 2001-01-23 Sony Corp 気相成長装置

Also Published As

Publication number Publication date
JPH0521867Y2 (US20100056889A1-20100304-C00004.png) 1993-06-04

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