JPS6422024U - - Google Patents
Info
- Publication number
- JPS6422024U JPS6422024U JP11590387U JP11590387U JPS6422024U JP S6422024 U JPS6422024 U JP S6422024U JP 11590387 U JP11590387 U JP 11590387U JP 11590387 U JP11590387 U JP 11590387U JP S6422024 U JPS6422024 U JP S6422024U
- Authority
- JP
- Japan
- Prior art keywords
- tray
- metal plate
- pressure cvd
- atmospheric pressure
- cvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11590387U JPS6422024U (enrdf_load_stackoverflow) | 1987-07-30 | 1987-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11590387U JPS6422024U (enrdf_load_stackoverflow) | 1987-07-30 | 1987-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6422024U true JPS6422024U (enrdf_load_stackoverflow) | 1989-02-03 |
Family
ID=31357969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11590387U Pending JPS6422024U (enrdf_load_stackoverflow) | 1987-07-30 | 1987-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6422024U (enrdf_load_stackoverflow) |
-
1987
- 1987-07-30 JP JP11590387U patent/JPS6422024U/ja active Pending
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