JPS6421883U - - Google Patents
Info
- Publication number
- JPS6421883U JPS6421883U JP11751787U JP11751787U JPS6421883U JP S6421883 U JPS6421883 U JP S6421883U JP 11751787 U JP11751787 U JP 11751787U JP 11751787 U JP11751787 U JP 11751787U JP S6421883 U JPS6421883 U JP S6421883U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- gas flow
- carrier gas
- valve
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012159 carrier gas Substances 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
Landscapes
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987117517U JPH0538307Y2 (nl) | 1987-07-31 | 1987-07-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987117517U JPH0538307Y2 (nl) | 1987-07-31 | 1987-07-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6421883U true JPS6421883U (nl) | 1989-02-03 |
| JPH0538307Y2 JPH0538307Y2 (nl) | 1993-09-28 |
Family
ID=31361042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987117517U Expired - Lifetime JPH0538307Y2 (nl) | 1987-07-31 | 1987-07-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0538307Y2 (nl) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4459297B1 (ja) * | 2009-12-25 | 2010-04-28 | 株式会社日立国際電気 | 半導体製造装置及び弁装置並びに半導体製造装置を用いたｃｖｄ処理方法及び半導体の製造方法 |
| JP2010116627A (ja) * | 2009-12-25 | 2010-05-27 | Hitachi Kokusai Electric Inc | 半導体製造装置及び弁装置並びに半導体製造装置を用いたｃｖｄ処理方法及び半導体の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5022344U (nl) * | 1973-06-19 | 1975-03-13 |
-
1987
- 1987-07-31 JP JP1987117517U patent/JPH0538307Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5022344U (nl) * | 1973-06-19 | 1975-03-13 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4459297B1 (ja) * | 2009-12-25 | 2010-04-28 | 株式会社日立国際電気 | 半導体製造装置及び弁装置並びに半導体製造装置を用いたｃｖｄ処理方法及び半導体の製造方法 |
| JP2010116627A (ja) * | 2009-12-25 | 2010-05-27 | Hitachi Kokusai Electric Inc | 半導体製造装置及び弁装置並びに半導体製造装置を用いたｃｖｄ処理方法及び半導体の製造方法 |
| JP2010159492A (ja) * | 2009-12-25 | 2010-07-22 | Hitachi Kokusai Electric Inc | 半導体製造装置及び弁装置並びに半導体製造装置を用いたｃｖｄ処理方法及び半導体の製造方法 |
| JP4523071B2 (ja) * | 2009-12-25 | 2010-08-11 | 株式会社日立国際電気 | 半導体製造装置及び弁装置並びに半導体製造装置を用いたｃｖｄ処理方法及び半導体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0538307Y2 (nl) | 1993-09-28 |