JPS642109Y2 - - Google Patents

Info

Publication number
JPS642109Y2
JPS642109Y2 JP18319183U JP18319183U JPS642109Y2 JP S642109 Y2 JPS642109 Y2 JP S642109Y2 JP 18319183 U JP18319183 U JP 18319183U JP 18319183 U JP18319183 U JP 18319183U JP S642109 Y2 JPS642109 Y2 JP S642109Y2
Authority
JP
Japan
Prior art keywords
dust
sliding door
collection box
clean room
dust collection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18319183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6089538U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18319183U priority Critical patent/JPS6089538U/ja
Publication of JPS6089538U publication Critical patent/JPS6089538U/ja
Application granted granted Critical
Publication of JPS642109Y2 publication Critical patent/JPS642109Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
JP18319183U 1983-11-28 1983-11-28 クリ−ンル−ムの防塵装置 Granted JPS6089538U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18319183U JPS6089538U (ja) 1983-11-28 1983-11-28 クリ−ンル−ムの防塵装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18319183U JPS6089538U (ja) 1983-11-28 1983-11-28 クリ−ンル−ムの防塵装置

Publications (2)

Publication Number Publication Date
JPS6089538U JPS6089538U (ja) 1985-06-19
JPS642109Y2 true JPS642109Y2 (US08177716-20120515-C00003.png) 1989-01-18

Family

ID=30396533

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18319183U Granted JPS6089538U (ja) 1983-11-28 1983-11-28 クリ−ンル−ムの防塵装置

Country Status (1)

Country Link
JP (1) JPS6089538U (US08177716-20120515-C00003.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129539A (ja) * 1983-12-16 1985-07-10 Hitachi Ltd 空気清浄装置

Also Published As

Publication number Publication date
JPS6089538U (ja) 1985-06-19

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