JPS6421074A - Method for selectively growing thin metallic film - Google Patents
Method for selectively growing thin metallic filmInfo
- Publication number
- JPS6421074A JPS6421074A JP17698787A JP17698787A JPS6421074A JP S6421074 A JPS6421074 A JP S6421074A JP 17698787 A JP17698787 A JP 17698787A JP 17698787 A JP17698787 A JP 17698787A JP S6421074 A JPS6421074 A JP S6421074A
- Authority
- JP
- Japan
- Prior art keywords
- film
- substrate
- tungsten
- tungsten film
- metallic film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17698787A JPS6421074A (en) | 1987-07-17 | 1987-07-17 | Method for selectively growing thin metallic film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17698787A JPS6421074A (en) | 1987-07-17 | 1987-07-17 | Method for selectively growing thin metallic film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6421074A true JPS6421074A (en) | 1989-01-24 |
Family
ID=16023203
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17698787A Pending JPS6421074A (en) | 1987-07-17 | 1987-07-17 | Method for selectively growing thin metallic film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6421074A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5176868A (en) * | 1991-01-24 | 1993-01-05 | Prince Manufacturing, Inc. | Long fiber reinforced thermoplastic frame especially for a tennis racquet |
US5180468A (en) * | 1990-07-05 | 1993-01-19 | Samsung Electronics Co., Ltd. | Method for growing a high-melting-point metal film |
JP2010115933A (ja) * | 2008-11-11 | 2010-05-27 | Kanto Auto Works Ltd | サスペンションタワーおよびサスペンション構造 |
-
1987
- 1987-07-17 JP JP17698787A patent/JPS6421074A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5180468A (en) * | 1990-07-05 | 1993-01-19 | Samsung Electronics Co., Ltd. | Method for growing a high-melting-point metal film |
US5176868A (en) * | 1991-01-24 | 1993-01-05 | Prince Manufacturing, Inc. | Long fiber reinforced thermoplastic frame especially for a tennis racquet |
JP2010115933A (ja) * | 2008-11-11 | 2010-05-27 | Kanto Auto Works Ltd | サスペンションタワーおよびサスペンション構造 |
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