JPS6421074A - Method for selectively growing thin metallic film - Google Patents

Method for selectively growing thin metallic film

Info

Publication number
JPS6421074A
JPS6421074A JP17698787A JP17698787A JPS6421074A JP S6421074 A JPS6421074 A JP S6421074A JP 17698787 A JP17698787 A JP 17698787A JP 17698787 A JP17698787 A JP 17698787A JP S6421074 A JPS6421074 A JP S6421074A
Authority
JP
Japan
Prior art keywords
film
substrate
tungsten
tungsten film
metallic film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17698787A
Other languages
English (en)
Inventor
Eisuke Nishitani
Susumu Tsujiku
Mitsuo Nakatani
Masaaki Maehara
Mitsuaki Horiuchi
Koichiro Mizukami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17698787A priority Critical patent/JPS6421074A/ja
Publication of JPS6421074A publication Critical patent/JPS6421074A/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP17698787A 1987-07-17 1987-07-17 Method for selectively growing thin metallic film Pending JPS6421074A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17698787A JPS6421074A (en) 1987-07-17 1987-07-17 Method for selectively growing thin metallic film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17698787A JPS6421074A (en) 1987-07-17 1987-07-17 Method for selectively growing thin metallic film

Publications (1)

Publication Number Publication Date
JPS6421074A true JPS6421074A (en) 1989-01-24

Family

ID=16023203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17698787A Pending JPS6421074A (en) 1987-07-17 1987-07-17 Method for selectively growing thin metallic film

Country Status (1)

Country Link
JP (1) JPS6421074A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5176868A (en) * 1991-01-24 1993-01-05 Prince Manufacturing, Inc. Long fiber reinforced thermoplastic frame especially for a tennis racquet
US5180468A (en) * 1990-07-05 1993-01-19 Samsung Electronics Co., Ltd. Method for growing a high-melting-point metal film
JP2010115933A (ja) * 2008-11-11 2010-05-27 Kanto Auto Works Ltd サスペンションタワーおよびサスペンション構造

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5180468A (en) * 1990-07-05 1993-01-19 Samsung Electronics Co., Ltd. Method for growing a high-melting-point metal film
US5176868A (en) * 1991-01-24 1993-01-05 Prince Manufacturing, Inc. Long fiber reinforced thermoplastic frame especially for a tennis racquet
JP2010115933A (ja) * 2008-11-11 2010-05-27 Kanto Auto Works Ltd サスペンションタワーおよびサスペンション構造

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