JPS6420625A - Surface treatment apparatus - Google Patents

Surface treatment apparatus

Info

Publication number
JPS6420625A
JPS6420625A JP17676987A JP17676987A JPS6420625A JP S6420625 A JPS6420625 A JP S6420625A JP 17676987 A JP17676987 A JP 17676987A JP 17676987 A JP17676987 A JP 17676987A JP S6420625 A JPS6420625 A JP S6420625A
Authority
JP
Japan
Prior art keywords
treated
vapor
chamber
filters
vapors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17676987A
Other languages
Japanese (ja)
Other versions
JP2555086B2 (en
Inventor
Yoshio Saito
Takehisa Nitta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62176769A priority Critical patent/JP2555086B2/en
Publication of JPS6420625A publication Critical patent/JPS6420625A/en
Application granted granted Critical
Publication of JP2555086B2 publication Critical patent/JP2555086B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE:To prevent recontamination or natural drying on the way of a process and to highly clean the surface of a material to be treated by individually supplying fluid vapors to be treated from a plurality of fluid treatment sources through filters and the like to a treatment chamber. CONSTITUTION:Chemical vapor, steam, solvent vapor generated in vapor generation layers 14-16 are individually supplied through vapor temperature controllers 26-28, valves 29-31 and filters 32-34 as vapors of high purity to a treating chamber 1 to which atmospheric gas is supplied. They are condensed by a heat exchanger 13, and continuously treated sequentially with treating liquid and vapor without exposing the surface of materials 4 to be treated in the chamber 1 with the atmosphere. Thus, a recontamination and a detrimental natural drying is prevented on the way of the step to highly clean the surface of the material to be treated.
JP62176769A 1987-07-15 1987-07-15 Surface treatment equipment Expired - Fee Related JP2555086B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62176769A JP2555086B2 (en) 1987-07-15 1987-07-15 Surface treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62176769A JP2555086B2 (en) 1987-07-15 1987-07-15 Surface treatment equipment

Publications (2)

Publication Number Publication Date
JPS6420625A true JPS6420625A (en) 1989-01-24
JP2555086B2 JP2555086B2 (en) 1996-11-20

Family

ID=16019503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62176769A Expired - Fee Related JP2555086B2 (en) 1987-07-15 1987-07-15 Surface treatment equipment

Country Status (1)

Country Link
JP (1) JP2555086B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06124936A (en) * 1992-10-13 1994-05-06 Yoshiki Kobayashi Surface treatment device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06124936A (en) * 1992-10-13 1994-05-06 Yoshiki Kobayashi Surface treatment device

Also Published As

Publication number Publication date
JP2555086B2 (en) 1996-11-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees