JPS6420625A - Surface treatment apparatus - Google Patents
Surface treatment apparatusInfo
- Publication number
- JPS6420625A JPS6420625A JP17676987A JP17676987A JPS6420625A JP S6420625 A JPS6420625 A JP S6420625A JP 17676987 A JP17676987 A JP 17676987A JP 17676987 A JP17676987 A JP 17676987A JP S6420625 A JPS6420625 A JP S6420625A
- Authority
- JP
- Japan
- Prior art keywords
- treated
- vapor
- chamber
- filters
- vapors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
PURPOSE:To prevent recontamination or natural drying on the way of a process and to highly clean the surface of a material to be treated by individually supplying fluid vapors to be treated from a plurality of fluid treatment sources through filters and the like to a treatment chamber. CONSTITUTION:Chemical vapor, steam, solvent vapor generated in vapor generation layers 14-16 are individually supplied through vapor temperature controllers 26-28, valves 29-31 and filters 32-34 as vapors of high purity to a treating chamber 1 to which atmospheric gas is supplied. They are condensed by a heat exchanger 13, and continuously treated sequentially with treating liquid and vapor without exposing the surface of materials 4 to be treated in the chamber 1 with the atmosphere. Thus, a recontamination and a detrimental natural drying is prevented on the way of the step to highly clean the surface of the material to be treated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62176769A JP2555086B2 (en) | 1987-07-15 | 1987-07-15 | Surface treatment equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62176769A JP2555086B2 (en) | 1987-07-15 | 1987-07-15 | Surface treatment equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6420625A true JPS6420625A (en) | 1989-01-24 |
JP2555086B2 JP2555086B2 (en) | 1996-11-20 |
Family
ID=16019503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62176769A Expired - Fee Related JP2555086B2 (en) | 1987-07-15 | 1987-07-15 | Surface treatment equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2555086B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06124936A (en) * | 1992-10-13 | 1994-05-06 | Yoshiki Kobayashi | Surface treatment device |
-
1987
- 1987-07-15 JP JP62176769A patent/JP2555086B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06124936A (en) * | 1992-10-13 | 1994-05-06 | Yoshiki Kobayashi | Surface treatment device |
Also Published As
Publication number | Publication date |
---|---|
JP2555086B2 (en) | 1996-11-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |