JPS6420617A - X-ray aligner - Google Patents

X-ray aligner

Info

Publication number
JPS6420617A
JPS6420617A JP62177664A JP17766487A JPS6420617A JP S6420617 A JPS6420617 A JP S6420617A JP 62177664 A JP62177664 A JP 62177664A JP 17766487 A JP17766487 A JP 17766487A JP S6420617 A JPS6420617 A JP S6420617A
Authority
JP
Japan
Prior art keywords
window
ray
mask
chamber
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62177664A
Other languages
English (en)
Inventor
Masaki Yamabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP62177664A priority Critical patent/JPS6420617A/ja
Publication of JPS6420617A publication Critical patent/JPS6420617A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece

Landscapes

  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP62177664A 1987-07-15 1987-07-15 X-ray aligner Pending JPS6420617A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62177664A JPS6420617A (en) 1987-07-15 1987-07-15 X-ray aligner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62177664A JPS6420617A (en) 1987-07-15 1987-07-15 X-ray aligner

Publications (1)

Publication Number Publication Date
JPS6420617A true JPS6420617A (en) 1989-01-24

Family

ID=16034948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62177664A Pending JPS6420617A (en) 1987-07-15 1987-07-15 X-ray aligner

Country Status (1)

Country Link
JP (1) JPS6420617A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002015989A (ja) * 1993-07-21 2002-01-18 Canon Inc 処理システム及びこれを用いた露光装置およびデバイス製造方法
JP2003068609A (ja) * 2001-08-24 2003-03-07 Nikon Corp 減圧雰囲気下処理装置、エネルギビーム照射装置及び露光装置
US8246633B2 (en) 2008-02-01 2012-08-21 Terumo Kabushiki Kaisha Medical manipulator and medical robot system

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002015989A (ja) * 1993-07-21 2002-01-18 Canon Inc 処理システム及びこれを用いた露光装置およびデバイス製造方法
JP2003068609A (ja) * 2001-08-24 2003-03-07 Nikon Corp 減圧雰囲気下処理装置、エネルギビーム照射装置及び露光装置
US8246633B2 (en) 2008-02-01 2012-08-21 Terumo Kabushiki Kaisha Medical manipulator and medical robot system

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