JPS6420505A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS6420505A JPS6420505A JP17762187A JP17762187A JPS6420505A JP S6420505 A JPS6420505 A JP S6420505A JP 17762187 A JP17762187 A JP 17762187A JP 17762187 A JP17762187 A JP 17762187A JP S6420505 A JPS6420505 A JP S6420505A
- Authority
- JP
- Japan
- Prior art keywords
- colored patterns
- intermediate layer
- colored
- solvent
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
PURPOSE:To stabilize colored patterns and to obtain desired device characteristics by forming the lower and upper layers of intermediate layers between the colored patterns of materials of different solvents. CONSTITUTION:The 1st intermediate layer 2 is formed on the underlying pattern 1 of a semiconductor substrate and a film 5 to be colored is formed thereon and is patterned by a photolithography method. The substrate is then immersed in a dyeing liquid to obtain the colored patterns 3. The 2nd intermediate layer 2 consisting of the material of the solvent different from the solvent of the intermediate layer 2 is then formed thereon and the next colored patterns are obtd. by the similar process. The dyeing process is repeated by changing the intermediate layers 2, 4 in such a manner, by which the color filter is formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17762187A JPS6420505A (en) | 1987-07-15 | 1987-07-15 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17762187A JPS6420505A (en) | 1987-07-15 | 1987-07-15 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6420505A true JPS6420505A (en) | 1989-01-24 |
Family
ID=16034204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17762187A Pending JPS6420505A (en) | 1987-07-15 | 1987-07-15 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6420505A (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58154808A (en) * | 1983-02-25 | 1983-09-14 | Hitachi Ltd | Color filter |
JPS59167053A (en) * | 1983-03-11 | 1984-09-20 | Toshiba Corp | Manufacture of color solid-state image pickup element |
JPS59181569A (en) * | 1983-03-31 | 1984-10-16 | Toshiba Corp | Manufacture of colored solid-state image pickup element |
JPS61289304A (en) * | 1985-06-17 | 1986-12-19 | Fuji Photo Film Co Ltd | Solid state color image sensing element |
JPS63158503A (en) * | 1986-12-23 | 1988-07-01 | Fuji Photo Film Co Ltd | Solid-state color image pickup element |
-
1987
- 1987-07-15 JP JP17762187A patent/JPS6420505A/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58154808A (en) * | 1983-02-25 | 1983-09-14 | Hitachi Ltd | Color filter |
JPS59167053A (en) * | 1983-03-11 | 1984-09-20 | Toshiba Corp | Manufacture of color solid-state image pickup element |
JPS59181569A (en) * | 1983-03-31 | 1984-10-16 | Toshiba Corp | Manufacture of colored solid-state image pickup element |
JPS61289304A (en) * | 1985-06-17 | 1986-12-19 | Fuji Photo Film Co Ltd | Solid state color image sensing element |
JPS63158503A (en) * | 1986-12-23 | 1988-07-01 | Fuji Photo Film Co Ltd | Solid-state color image pickup element |
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