JPS6420505A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS6420505A
JPS6420505A JP17762187A JP17762187A JPS6420505A JP S6420505 A JPS6420505 A JP S6420505A JP 17762187 A JP17762187 A JP 17762187A JP 17762187 A JP17762187 A JP 17762187A JP S6420505 A JPS6420505 A JP S6420505A
Authority
JP
Japan
Prior art keywords
colored patterns
intermediate layer
colored
solvent
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17762187A
Other languages
Japanese (ja)
Inventor
Masahiro Yoneyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP17762187A priority Critical patent/JPS6420505A/en
Publication of JPS6420505A publication Critical patent/JPS6420505A/en
Pending legal-status Critical Current

Links

Landscapes

  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To stabilize colored patterns and to obtain desired device characteristics by forming the lower and upper layers of intermediate layers between the colored patterns of materials of different solvents. CONSTITUTION:The 1st intermediate layer 2 is formed on the underlying pattern 1 of a semiconductor substrate and a film 5 to be colored is formed thereon and is patterned by a photolithography method. The substrate is then immersed in a dyeing liquid to obtain the colored patterns 3. The 2nd intermediate layer 2 consisting of the material of the solvent different from the solvent of the intermediate layer 2 is then formed thereon and the next colored patterns are obtd. by the similar process. The dyeing process is repeated by changing the intermediate layers 2, 4 in such a manner, by which the color filter is formed.
JP17762187A 1987-07-15 1987-07-15 Production of semiconductor device Pending JPS6420505A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17762187A JPS6420505A (en) 1987-07-15 1987-07-15 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17762187A JPS6420505A (en) 1987-07-15 1987-07-15 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6420505A true JPS6420505A (en) 1989-01-24

Family

ID=16034204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17762187A Pending JPS6420505A (en) 1987-07-15 1987-07-15 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6420505A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154808A (en) * 1983-02-25 1983-09-14 Hitachi Ltd Color filter
JPS59167053A (en) * 1983-03-11 1984-09-20 Toshiba Corp Manufacture of color solid-state image pickup element
JPS59181569A (en) * 1983-03-31 1984-10-16 Toshiba Corp Manufacture of colored solid-state image pickup element
JPS61289304A (en) * 1985-06-17 1986-12-19 Fuji Photo Film Co Ltd Solid state color image sensing element
JPS63158503A (en) * 1986-12-23 1988-07-01 Fuji Photo Film Co Ltd Solid-state color image pickup element

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58154808A (en) * 1983-02-25 1983-09-14 Hitachi Ltd Color filter
JPS59167053A (en) * 1983-03-11 1984-09-20 Toshiba Corp Manufacture of color solid-state image pickup element
JPS59181569A (en) * 1983-03-31 1984-10-16 Toshiba Corp Manufacture of colored solid-state image pickup element
JPS61289304A (en) * 1985-06-17 1986-12-19 Fuji Photo Film Co Ltd Solid state color image sensing element
JPS63158503A (en) * 1986-12-23 1988-07-01 Fuji Photo Film Co Ltd Solid-state color image pickup element

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