JPS6419345A - High contrast positive photoresist developer containing alkanol amine - Google Patents
High contrast positive photoresist developer containing alkanol amineInfo
- Publication number
- JPS6419345A JPS6419345A JP63082372A JP8237288A JPS6419345A JP S6419345 A JPS6419345 A JP S6419345A JP 63082372 A JP63082372 A JP 63082372A JP 8237288 A JP8237288 A JP 8237288A JP S6419345 A JPS6419345 A JP S6419345A
- Authority
- JP
- Japan
- Prior art keywords
- compsn
- photoresist
- developer
- additive
- high contrast
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
- G03C7/00—Multicolour photographic processes or agents therefor; Regeneration of such processing agents; Photosensitive materials for multicolour processes
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/30—Imagewise removal using liquid means
- G03F7/32—Liquid compositions therefor, e.g. developers
- G03F7/322—Aqueous alkaline compositions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/035,413 US4808513A (en) | 1987-04-06 | 1987-04-06 | Method of developing a high contrast, positive photoresist using a developer containing alkanolamine |
US16063988A | 1988-03-10 | 1988-03-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6419345A true JPS6419345A (en) | 1989-01-23 |
Family
ID=26712093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63082372A Withdrawn JPS6419345A (en) | 1987-04-06 | 1988-04-05 | High contrast positive photoresist developer containing alkanol amine |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP0286272B1 (da) |
JP (1) | JPS6419345A (da) |
KR (1) | KR940007785B1 (da) |
AU (1) | AU606667B2 (da) |
DE (1) | DE3886971T2 (da) |
DK (1) | DK183888A (da) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02151866A (ja) * | 1988-11-21 | 1990-06-11 | Macdermid Inc | フォトレジスト現像液 |
JP2005340757A (ja) * | 2004-05-22 | 2005-12-08 | Hynix Semiconductor Inc | イマージョンリソグラフィー用液体組成物及びこれを利用したリソグラフィー方法、イマージョンリソグラフィー装置、半導体素子及び半導体素子の製造方法 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4997748A (en) * | 1988-08-26 | 1991-03-05 | Tokyo Ohka Kogyo Co., Ltd. | Developer solution for positive-working resist composition |
DE58908699D1 (de) * | 1989-03-20 | 1995-01-12 | Siemens Ag | Verfahren zum Erzeugen einer Photoresiststruktur. |
DE3941394A1 (de) * | 1989-12-15 | 1991-06-20 | Basf Ag | Waessrige entwicklerloesung und verfahren zum entwickeln von photoresisten |
US5998102A (en) * | 1997-10-06 | 1999-12-07 | Agfa Corporation | Etch inhibitors in developer for lithographic printing plates |
CA2292572A1 (en) * | 1998-04-15 | 1999-10-21 | Zoilo Cheng Ho Tan | Photoresist developer and method of development |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57114141A (en) * | 1981-01-06 | 1982-07-15 | San Ei Chem Ind Ltd | Increasing method for developing power of developer for positive type photosensitive resin |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56122130A (en) * | 1980-02-28 | 1981-09-25 | Sharp Corp | Method for forming pattern of thin film transistor |
JPS59182444A (ja) * | 1983-04-01 | 1984-10-17 | Sumitomo Chem Co Ltd | ポジ型フオトレジストの改良現像液 |
US4710449A (en) * | 1986-01-29 | 1987-12-01 | Petrarch Systems, Inc. | High contrast low metal ion positive photoresist developing method using aqueous base solutions with surfactants |
JPH0638159B2 (ja) * | 1986-07-18 | 1994-05-18 | 東京応化工業株式会社 | ポジ型ホトレジスト用現像液 |
-
1988
- 1988-03-23 DE DE3886971T patent/DE3886971T2/de not_active Expired - Fee Related
- 1988-03-23 EP EP19880302542 patent/EP0286272B1/en not_active Expired - Lifetime
- 1988-03-30 AU AU13868/88A patent/AU606667B2/en not_active Ceased
- 1988-04-05 DK DK183888A patent/DK183888A/da not_active Application Discontinuation
- 1988-04-05 JP JP63082372A patent/JPS6419345A/ja not_active Withdrawn
- 1988-04-06 KR KR1019880003914A patent/KR940007785B1/ko not_active IP Right Cessation
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57114141A (en) * | 1981-01-06 | 1982-07-15 | San Ei Chem Ind Ltd | Increasing method for developing power of developer for positive type photosensitive resin |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02151866A (ja) * | 1988-11-21 | 1990-06-11 | Macdermid Inc | フォトレジスト現像液 |
JP2005340757A (ja) * | 2004-05-22 | 2005-12-08 | Hynix Semiconductor Inc | イマージョンリソグラフィー用液体組成物及びこれを利用したリソグラフィー方法、イマージョンリソグラフィー装置、半導体素子及び半導体素子の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
DE3886971D1 (de) | 1994-02-24 |
AU606667B2 (en) | 1991-02-14 |
KR880013043A (ko) | 1988-11-29 |
AU1386888A (en) | 1988-10-06 |
EP0286272B1 (en) | 1994-01-12 |
DE3886971T2 (de) | 1994-05-19 |
DK183888A (da) | 1988-10-07 |
KR940007785B1 (ko) | 1994-08-25 |
DK183888D0 (da) | 1988-04-05 |
EP0286272A3 (en) | 1989-03-22 |
EP0286272A2 (en) | 1988-10-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |