JPS6419249U - - Google Patents
Info
- Publication number
- JPS6419249U JPS6419249U JP11344187U JP11344187U JPS6419249U JP S6419249 U JPS6419249 U JP S6419249U JP 11344187 U JP11344187 U JP 11344187U JP 11344187 U JP11344187 U JP 11344187U JP S6419249 U JPS6419249 U JP S6419249U
- Authority
- JP
- Japan
- Prior art keywords
- ultra
- vacuum
- ground electrode
- high potential
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 claims description 2
- 238000005211 surface analysis Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
Description
第１図は本考案による等脚台形アナライザーの
断面図。第２図は表面解析装置の全体図。第３図
は本考案による等脚台形アナライザーに於ける等
電位面分布図。第４図は平行電極を複数枚並べた
直方体状アナライザーに於ける等電位面分布図。
第５図は平行２電極よりなる従来例のアナライザ
ー原理図。第６図は第５図のアナライザーに於け
る等電位面分布図。第７図は平行電極を複数枚並
べた直方体状アナライザー原理図。
Ｑ０……接地電極、Ｑｆ……高電位側電極、Ｑ
１〜Ｑ４……中間電極、Ｒ１〜Ｒ５……分圧抵抗
、１……イオン源、２……マグネツト、３……コ
リメータ、４……加減速管、５……試料、６……
位置検出器、７……マグネツト、８……超高真空
チヤンバ、９……ステージ、１０……静電アナラ
イザー、２１〜２３……スリツト、２５……スリ
ツト、３１〜３６……真空排気装置、４０……ケ
ース、４１……上板、４２……下板、４３，４４
……側板。
FIG. 1 is a sectional view of the isosceles trapezoidal analyzer according to the present invention. Figure 2 is an overall diagram of the surface analysis device. Figure 3 is an equipotential surface distribution diagram in the isosceles trapezoidal analyzer according to the present invention. Figure 4 is an equipotential surface distribution diagram in a rectangular parallelepiped analyzer with multiple parallel electrodes arranged.
FIG. 5 is a diagram showing the principle of a conventional analyzer consisting of two parallel electrodes. Figure 6 is an equipotential surface distribution diagram in the analyzer shown in Figure 5. Figure 7 shows the principle of a rectangular parallelepiped analyzer with multiple parallel electrodes arranged. Q0 ...Ground electrode, Qf...High potential side electrode, Q
1 - Q 4 ... intermediate electrode, R 1 - R 5 ... partial pressure resistance, 1 ... ion source, 2 ... magnet, 3 ... collimator, 4 ... acceleration/deceleration tube, 5 ... sample, 6 ... …
Position detector, 7... Magnet, 8... Ultra-high vacuum chamber, 9... Stage, 10... Electrostatic analyzer, 21-23... Slit, 25... Slit, 31-36... Vacuum exhaust device, 40... Case, 41... Upper plate, 42... Lower plate, 43, 44
...Side plate.
Claims (1)
１と、該イオン源１から生じた陽子ビームを真空
中に於て偏向させるマグネツト２と、イオン源１
、マグネツト２を経た陽子ビームを加速する加速
管と、試料５を超高真空中に保持する超高真空チ
ヤンバ８と、試料で散乱された陽子ビームのうち
所定の散乱角のもののみを通し真空中に於てこれ
を減速する減速管と、減速された陽子のエネルギ
ーを測定する真空中に保たれた静電アナライザー
１０とを含み、静電アナライザー１０は、スリツ
ト２５を有する最も長い接地電極Ｑ０と、接地電
極より短い高電位電極Ｑｆと、接地電極Ｑ０と高
電位電極Ｑｆの間に設けられ等脚台形状をなすよ
うに互に平行に設置される中間電極Ｑ１，Ｑ２…
と、接地電極Ｑ０と中間電極Ｑ１，Ｑ２…と高電
位電極Ｑｆの間に設けられる分圧抵抗Ｒ１，Ｒ２
…と、接地電極Ｑ０と高電位電極Ｑｆの間に正電
圧Ｖ３を印加するアナライザー電源と、これらの
電極Ｑ０，Ｑ１…，Ｑｆを囲む等脚台形状のケー
ス４０とよりなる事を特徴とする表面解析装置。 An ion source 1 kept in a vacuum that generates a proton beam, a magnet 2 that deflects the proton beam generated from the ion source 1 in a vacuum, and an ion source 1
, an acceleration tube that accelerates the proton beam that has passed through the magnet 2, an ultra-high vacuum chamber 8 that holds the sample 5 in an ultra-high vacuum, and an ultra-high vacuum chamber 8 that holds the sample 5 in an ultra-high vacuum. The electrostatic analyzer 10 includes a deceleration tube that decelerates the protons and an electrostatic analyzer 10 kept in a vacuum that measures the energy of the decelerated protons. 0 , a high potential electrode Qf shorter than the ground electrode, and intermediate electrodes Q 1 , Q 2 , which are provided between the ground electrode Q 0 and the high potential electrode Qf and are arranged parallel to each other so as to form an isosceles trapezoidal shape.
and voltage dividing resistors R 1 , R 2 provided between the ground electrode Q 0 , the intermediate electrodes Q 1 , Q 2 . . . and the high potential electrode Qf.
..., an analyzer power supply that applies a positive voltage V3 between the ground electrode Q0 and the high potential electrode Qf, and an isosceles trapezoidal case 40 surrounding these electrodes Q0 , Q1 ..., Qf. A surface analysis device featuring:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11344187U JPS6419249U (en) | 1987-07-24 | 1987-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11344187U JPS6419249U (en) | 1987-07-24 | 1987-07-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6419249U true JPS6419249U (en) | 1989-01-31 |
Family
ID=31353279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11344187U Pending JPS6419249U (en) | 1987-07-24 | 1987-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6419249U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012533855A (en) * | 2009-07-17 | 2012-12-27 | ケーエルエー−テンカー・コーポレーション | Charged particle energy analyzer |
-
1987
- 1987-07-24 JP JP11344187U patent/JPS6419249U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012533855A (en) * | 2009-07-17 | 2012-12-27 | ケーエルエー−テンカー・コーポレーション | Charged particle energy analyzer |
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