JPS6418159U - - Google Patents
Info
- Publication number
- JPS6418159U JPS6418159U JP8698588U JP8698588U JPS6418159U JP S6418159 U JPS6418159 U JP S6418159U JP 8698588 U JP8698588 U JP 8698588U JP 8698588 U JP8698588 U JP 8698588U JP S6418159 U JPS6418159 U JP S6418159U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- reaction tube
- vertical
- growth
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 14
- 238000006243 chemical reaction Methods 0.000 claims description 6
- 238000001947 vapour-phase growth Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000006698 induction Effects 0.000 claims description 4
- 210000000078 claw Anatomy 0.000 claims description 3
- 230000005684 electric field Effects 0.000 claims 1
- 230000020169 heat generation Effects 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8698588U JPH0235814Y2 (en:Method) | 1988-06-30 | 1988-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8698588U JPH0235814Y2 (en:Method) | 1988-06-30 | 1988-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6418159U true JPS6418159U (en:Method) | 1989-01-30 |
| JPH0235814Y2 JPH0235814Y2 (en:Method) | 1990-09-28 |
Family
ID=31311622
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8698588U Expired JPH0235814Y2 (en:Method) | 1988-06-30 | 1988-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235814Y2 (en:Method) |
-
1988
- 1988-06-30 JP JP8698588U patent/JPH0235814Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0235814Y2 (en:Method) | 1990-09-28 |
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