JPS62126362U - - Google Patents

Info

Publication number
JPS62126362U
JPS62126362U JP16943986U JP16943986U JPS62126362U JP S62126362 U JPS62126362 U JP S62126362U JP 16943986 U JP16943986 U JP 16943986U JP 16943986 U JP16943986 U JP 16943986U JP S62126362 U JPS62126362 U JP S62126362U
Authority
JP
Japan
Prior art keywords
support stand
workpiece
gas
chamber
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16943986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0111721Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986169439U priority Critical patent/JPH0111721Y2/ja
Publication of JPS62126362U publication Critical patent/JPS62126362U/ja
Application granted granted Critical
Publication of JPH0111721Y2 publication Critical patent/JPH0111721Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Chemical Vapour Deposition (AREA)
JP1986169439U 1986-11-04 1986-11-04 Expired JPH0111721Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986169439U JPH0111721Y2 (en:Method) 1986-11-04 1986-11-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986169439U JPH0111721Y2 (en:Method) 1986-11-04 1986-11-04

Publications (2)

Publication Number Publication Date
JPS62126362U true JPS62126362U (en:Method) 1987-08-11
JPH0111721Y2 JPH0111721Y2 (en:Method) 1989-04-06

Family

ID=31103250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986169439U Expired JPH0111721Y2 (en:Method) 1986-11-04 1986-11-04

Country Status (1)

Country Link
JP (1) JPH0111721Y2 (en:Method)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006274390A (ja) * 2005-03-30 2006-10-12 Yamaguchi Prefecture ＳｉＮｘＯｙＣｚ膜及び薄膜の成膜方法
JP2012152732A (ja) * 2011-01-26 2012-08-16 秉豊 ▲頼▼ プラズマ反応方法及びプラズマ反応装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144891A (en) * 1977-05-25 1978-12-16 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for production of inorganic compound
JPS5488016U (en:Method) * 1977-11-30 1979-06-21

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144891A (en) * 1977-05-25 1978-12-16 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for production of inorganic compound
JPS5488016U (en:Method) * 1977-11-30 1979-06-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006274390A (ja) * 2005-03-30 2006-10-12 Yamaguchi Prefecture ＳｉＮｘＯｙＣｚ膜及び薄膜の成膜方法
JP2012152732A (ja) * 2011-01-26 2012-08-16 秉豊 ▲頼▼ プラズマ反応方法及びプラズマ反応装置

Also Published As

Publication number Publication date
JPH0111721Y2 (en:Method) 1989-04-06

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