JPS6418098A - Multilayer film reflecting mirror - Google Patents
Multilayer film reflecting mirrorInfo
- Publication number
- JPS6418098A JPS6418098A JP17543487A JP17543487A JPS6418098A JP S6418098 A JPS6418098 A JP S6418098A JP 17543487 A JP17543487 A JP 17543487A JP 17543487 A JP17543487 A JP 17543487A JP S6418098 A JPS6418098 A JP S6418098A
- Authority
- JP
- Japan
- Prior art keywords
- film
- refractive index
- hydrocarbon
- high refractive
- reflecting mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To lessen roentgen ray absorption, increase the number of laminates and obtain high reflectance by applying a hydrocarbon film as a second film on a multilayer film reflecting mirror in which a first film of low refractive index and the second film of high refractive index are laminated each other. CONSTITUTION:A first film 12 of low refractive index and a second film 13 of high refractive index are laminated on a board 11 each other. The board 11 is composed of silicon or silicon carbide and the like from the viewpoint in which they are normally good polishing and high thermal conductivity. A hydrocarbon film is applied to form of soft elements as the second film 13 of high refractive index if possible. The hydrocarbon film is normally more lighter than the carbon film applied as high refractive index and a low absorption layer and low absorption can be expected. The second film 13 of hydrocarbon is definitely composed of material such as polyparaxylen and formed as a film by means of vacuum evaporation. The hydrocarbon formed by plasma polymerization and the like is stable and desirable.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17543487A JPH0795120B2 (en) | 1987-07-13 | 1987-07-13 | Multilayer film mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17543487A JPH0795120B2 (en) | 1987-07-13 | 1987-07-13 | Multilayer film mirror |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6418098A true JPS6418098A (en) | 1989-01-20 |
JPH0795120B2 JPH0795120B2 (en) | 1995-10-11 |
Family
ID=15996030
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17543487A Expired - Fee Related JPH0795120B2 (en) | 1987-07-13 | 1987-07-13 | Multilayer film mirror |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0795120B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62215643A (en) * | 1986-03-14 | 1987-09-22 | Mitsubishi Cable Ind Ltd | Flame-retardant resin composition |
KR100589240B1 (en) * | 1999-07-02 | 2006-06-14 | 에이에스엠엘 네델란즈 비.브이. | Capping layer for euv optical elements |
-
1987
- 1987-07-13 JP JP17543487A patent/JPH0795120B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62215643A (en) * | 1986-03-14 | 1987-09-22 | Mitsubishi Cable Ind Ltd | Flame-retardant resin composition |
KR100589240B1 (en) * | 1999-07-02 | 2006-06-14 | 에이에스엠엘 네델란즈 비.브이. | Capping layer for euv optical elements |
Also Published As
Publication number | Publication date |
---|---|
JPH0795120B2 (en) | 1995-10-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |