JPS6418098A - Multilayer film reflecting mirror - Google Patents

Multilayer film reflecting mirror

Info

Publication number
JPS6418098A
JPS6418098A JP17543487A JP17543487A JPS6418098A JP S6418098 A JPS6418098 A JP S6418098A JP 17543487 A JP17543487 A JP 17543487A JP 17543487 A JP17543487 A JP 17543487A JP S6418098 A JPS6418098 A JP S6418098A
Authority
JP
Japan
Prior art keywords
film
refractive index
hydrocarbon
high refractive
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17543487A
Other languages
English (en)
Other versions
JPH0795120B2 (ja
Inventor
Izumi Kataoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Aviation Electronics Industry Ltd
Original Assignee
Japan Aviation Electronics Industry Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Aviation Electronics Industry Ltd filed Critical Japan Aviation Electronics Industry Ltd
Priority to JP17543487A priority Critical patent/JPH0795120B2/ja
Publication of JPS6418098A publication Critical patent/JPS6418098A/ja
Publication of JPH0795120B2 publication Critical patent/JPH0795120B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP17543487A 1987-07-13 1987-07-13 多層膜反射鏡 Expired - Fee Related JPH0795120B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17543487A JPH0795120B2 (ja) 1987-07-13 1987-07-13 多層膜反射鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17543487A JPH0795120B2 (ja) 1987-07-13 1987-07-13 多層膜反射鏡

Publications (2)

Publication Number Publication Date
JPS6418098A true JPS6418098A (en) 1989-01-20
JPH0795120B2 JPH0795120B2 (ja) 1995-10-11

Family

ID=15996030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17543487A Expired - Fee Related JPH0795120B2 (ja) 1987-07-13 1987-07-13 多層膜反射鏡

Country Status (1)

Country Link
JP (1) JPH0795120B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62215643A (ja) * 1986-03-14 1987-09-22 Mitsubishi Cable Ind Ltd 難燃性樹脂組成物
KR100589240B1 (ko) * 1999-07-02 2006-06-14 에이에스엠엘 네델란즈 비.브이. Ｅｕｖ 광학 요소의 캡핑 층

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62215643A (ja) * 1986-03-14 1987-09-22 Mitsubishi Cable Ind Ltd 難燃性樹脂組成物
KR100589240B1 (ko) * 1999-07-02 2006-06-14 에이에스엠엘 네델란즈 비.브이. Ｅｕｖ 광학 요소의 캡핑 층

Also Published As

Publication number Publication date
JPH0795120B2 (ja) 1995-10-11

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees