JPS6417861A - Magnetron cathode for producing magneto-optical recording medium - Google Patents

Magnetron cathode for producing magneto-optical recording medium

Info

Publication number
JPS6417861A
JPS6417861A JP17314387A JP17314387A JPS6417861A JP S6417861 A JPS6417861 A JP S6417861A JP 17314387 A JP17314387 A JP 17314387A JP 17314387 A JP17314387 A JP 17314387A JP S6417861 A JPS6417861 A JP S6417861A
Authority
JP
Japan
Prior art keywords
recording medium
magnetron sputtering
optical recording
magneto
magnetron cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17314387A
Other languages
Japanese (ja)
Inventor
Mamoru Sugimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP17314387A priority Critical patent/JPS6417861A/en
Publication of JPS6417861A publication Critical patent/JPS6417861A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To form the titled cathode which improves the productivity of a magneto-optical recording medium by constituting a magnetron sputtering device in such a manner that the electron trap zone for the purpose of magnetron sputtering is not closed by a target surface. CONSTITUTION:The electron trap zone 1 for magnetron sputtering of the magnetron sputtering device having the target 2 essentially consisting of a rare earth- transition metal and a permanent magnet or electromagnet 3 for the purpose of magnetron sputtering is put in the state of not closing the same by the target surface. The production capacity of the magneto-optical recording medium is thereby greatly increased.
JP17314387A 1987-07-10 1987-07-10 Magnetron cathode for producing magneto-optical recording medium Pending JPS6417861A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17314387A JPS6417861A (en) 1987-07-10 1987-07-10 Magnetron cathode for producing magneto-optical recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17314387A JPS6417861A (en) 1987-07-10 1987-07-10 Magnetron cathode for producing magneto-optical recording medium

Publications (1)

Publication Number Publication Date
JPS6417861A true JPS6417861A (en) 1989-01-20

Family

ID=15954910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17314387A Pending JPS6417861A (en) 1987-07-10 1987-07-10 Magnetron cathode for producing magneto-optical recording medium

Country Status (1)

Country Link
JP (1) JPS6417861A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012165385A1 (en) * 2011-05-30 2012-12-06 日立金属株式会社 Racetrack-shape magnetic field generator for magnetron sputtering

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012165385A1 (en) * 2011-05-30 2012-12-06 日立金属株式会社 Racetrack-shape magnetic field generator for magnetron sputtering
US9378934B2 (en) 2011-05-30 2016-06-28 Hitachi Metals, Ltd. Racetrack-shaped magnetic-field-generating apparatus for magnetron sputtering

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