JPS6417861A - Magnetron cathode for producing magneto-optical recording medium - Google Patents
Magnetron cathode for producing magneto-optical recording mediumInfo
- Publication number
- JPS6417861A JPS6417861A JP17314387A JP17314387A JPS6417861A JP S6417861 A JPS6417861 A JP S6417861A JP 17314387 A JP17314387 A JP 17314387A JP 17314387 A JP17314387 A JP 17314387A JP S6417861 A JPS6417861 A JP S6417861A
- Authority
- JP
- Japan
- Prior art keywords
- recording medium
- magnetron sputtering
- optical recording
- magneto
- magnetron cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To form the titled cathode which improves the productivity of a magneto-optical recording medium by constituting a magnetron sputtering device in such a manner that the electron trap zone for the purpose of magnetron sputtering is not closed by a target surface. CONSTITUTION:The electron trap zone 1 for magnetron sputtering of the magnetron sputtering device having the target 2 essentially consisting of a rare earth- transition metal and a permanent magnet or electromagnet 3 for the purpose of magnetron sputtering is put in the state of not closing the same by the target surface. The production capacity of the magneto-optical recording medium is thereby greatly increased.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17314387A JPS6417861A (en) | 1987-07-10 | 1987-07-10 | Magnetron cathode for producing magneto-optical recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17314387A JPS6417861A (en) | 1987-07-10 | 1987-07-10 | Magnetron cathode for producing magneto-optical recording medium |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6417861A true JPS6417861A (en) | 1989-01-20 |
Family
ID=15954910
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17314387A Pending JPS6417861A (en) | 1987-07-10 | 1987-07-10 | Magnetron cathode for producing magneto-optical recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6417861A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012165385A1 (en) * | 2011-05-30 | 2012-12-06 | 日立金属株式会社 | Racetrack-shape magnetic field generator for magnetron sputtering |
-
1987
- 1987-07-10 JP JP17314387A patent/JPS6417861A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012165385A1 (en) * | 2011-05-30 | 2012-12-06 | 日立金属株式会社 | Racetrack-shape magnetic field generator for magnetron sputtering |
US9378934B2 (en) | 2011-05-30 | 2016-06-28 | Hitachi Metals, Ltd. | Racetrack-shaped magnetic-field-generating apparatus for magnetron sputtering |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2073311A1 (en) | Magneto-optical recording medium whereon recording is carried out with an overwriting function | |
JPS5926665B2 (en) | Cathode device that turns target material into dust in cathode sputtering device | |
JPS57195329A (en) | Magnetic recording medium | |
EP0210473A3 (en) | Sputtering cathode according to the magnetron principle | |
JPS55117723A (en) | Magnetic head | |
AU4978490A (en) | Magnetooptic layer and a process for its fabrication | |
JPS5418709A (en) | Production of magnetic recording media | |
JPS6417861A (en) | Magnetron cathode for producing magneto-optical recording medium | |
GB1358411A (en) | Sputtering | |
JPS57194255A (en) | Sputtering device | |
JPS5745208A (en) | Magnetic recording medium | |
JPS5747870A (en) | Magnetron sputtering method for ferromagnetic material | |
JPS5743986A (en) | Film forming apparatus | |
JPS57105838A (en) | Photo-thermal magnetic recording medium | |
JPS60262970A (en) | Cathode apparatus for magnetic material target | |
JPS6437720A (en) | Production of magnetic recording medium | |
JPS62285253A (en) | Manufacture of photomagnetic recording medium | |
KR950006432Y1 (en) | Optical recoring disk | |
JPS57201004A (en) | Magnetic recording medium | |
JPS57104203A (en) | Production of permanent magnet alloy | |
JPS57137469A (en) | Sputtering device | |
JPS53141197A (en) | Process for producing magnetic oxide film | |
JPS6415369A (en) | Target for sputtering | |
JPS5412708A (en) | Production of magnetic recording media | |
JPS6417410A (en) | Magnetic thin-film |