JPS6417792U - - Google Patents

Info

Publication number

JPS6417792U

JPS6417792U JP11307487U JP11307487U JPS6417792U JP S6417792 U JPS6417792 U JP S6417792U JP 11307487 U JP11307487 U JP 11307487U JP 11307487 U JP11307487 U JP 11307487U JP S6417792 U JPS6417792 U JP S6417792U

Authority

JP

Japan

Prior art keywords

holding device

utility

model registration

electrostatic holding

thermal conductivity

Prior art date

1987-07-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 6
• 239000011248 coating agent Substances 0.000 claims description 2
• 238000000576 coating method Methods 0.000 claims description 2
• 239000000463 material Substances 0.000 claims 6
• 239000012777 electrically insulating material Substances 0.000 claims 3
• 239000011347 resin Substances 0.000 claims 2
• 229920005989 resin Polymers 0.000 claims 2
• 229910052582 BN Inorganic materials 0.000 claims 1
• PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical group N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims 1
• 239000000919 ceramic Substances 0.000 claims 1
• 238000001816 cooling Methods 0.000 claims 1
• 229920001971 elastomer Polymers 0.000 claims 1
• 239000000806 elastomer Substances 0.000 claims 1
• 230000005611 electricity Effects 0.000 claims 1
• 230000005686 electrostatic field Effects 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 239000003507 refrigerant Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1
• 239000010408 film Substances 0.000 description 1
• 239000010409 thin film Substances 0.000 description 1