JPS641228A - Jig for heat treating wafer - Google Patents
Jig for heat treating waferInfo
- Publication number
- JPS641228A JPS641228A JP15633987A JP15633987A JPS641228A JP S641228 A JPS641228 A JP S641228A JP 15633987 A JP15633987 A JP 15633987A JP 15633987 A JP15633987 A JP 15633987A JP S641228 A JPS641228 A JP S641228A
- Authority
- JP
- Japan
- Prior art keywords
- circumference
- columns
- jig
- pins
- supporting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To reduce flying amount of dust from an atmosphere by disposing a protecting cylinder member on the periphery of a semiconductor wafer placed on a jig body.
CONSTITUTION: A jig body 20 has a plurality of supporting columns 22 inserted at the center of a lower platelike body 21 along its circumference, an upper platelike body 23 arranged on the upper ends of the columns 22, and a plurality of positioning pins 24 protruded on the same circumference outside the inserting positions of the columns 22. Supporting grooves 23a for supporting a wafer are opened at the same height positions. The diameter of the circumference for placing the pins 24 is formed larger than that of the body 23. A protecting cylinder member 30 is formed at its lower and upper ends with lower and upper openings 31, 33. The diameter of the opening 31 is slightly larger than that of the circumference for placing the pins 24. At least one vent hole 32 is formed at the periphery of the lower opening.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62156339A JP2593660B2 (en) | 1987-06-23 | 1987-06-23 | Jig for wafer heat treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62156339A JP2593660B2 (en) | 1987-06-23 | 1987-06-23 | Jig for wafer heat treatment |
Publications (3)
Publication Number | Publication Date |
---|---|
JPS641228A true JPS641228A (en) | 1989-01-05 |
JPH011228A JPH011228A (en) | 1989-01-05 |
JP2593660B2 JP2593660B2 (en) | 1997-03-26 |
Family
ID=15625607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62156339A Expired - Fee Related JP2593660B2 (en) | 1987-06-23 | 1987-06-23 | Jig for wafer heat treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2593660B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04163913A (en) * | 1990-10-29 | 1992-06-09 | Nec Corp | Vertical type heat treat furnace |
JPH054463U (en) * | 1991-07-01 | 1993-01-22 | 古河電気工業株式会社 | Vapor phase growth equipment |
WO2009138637A1 (en) * | 2008-04-24 | 2009-11-19 | Alcatel Lucent | Station and method for measuring the contamination of an enclosure used for transporting semiconductor substrates |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140413A (en) * | 1985-12-16 | 1987-06-24 | Nec Corp | Vertical type diffusion equipment |
-
1987
- 1987-06-23 JP JP62156339A patent/JP2593660B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140413A (en) * | 1985-12-16 | 1987-06-24 | Nec Corp | Vertical type diffusion equipment |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04163913A (en) * | 1990-10-29 | 1992-06-09 | Nec Corp | Vertical type heat treat furnace |
JPH054463U (en) * | 1991-07-01 | 1993-01-22 | 古河電気工業株式会社 | Vapor phase growth equipment |
WO2009138637A1 (en) * | 2008-04-24 | 2009-11-19 | Alcatel Lucent | Station and method for measuring the contamination of an enclosure used for transporting semiconductor substrates |
Also Published As
Publication number | Publication date |
---|---|
JP2593660B2 (en) | 1997-03-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |