JPS6410140A - Vibration type strain sensor - Google Patents
Vibration type strain sensorInfo
- Publication number
- JPS6410140A JPS6410140A JP16617787A JP16617787A JPS6410140A JP S6410140 A JPS6410140 A JP S6410140A JP 16617787 A JP16617787 A JP 16617787A JP 16617787 A JP16617787 A JP 16617787A JP S6410140 A JPS6410140 A JP S6410140A
- Authority
- JP
- Japan
- Prior art keywords
- vibration beam
- substrate
- vibration
- atoms
- strain sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16617787A JPS6410140A (en) | 1987-07-02 | 1987-07-02 | Vibration type strain sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16617787A JPS6410140A (en) | 1987-07-02 | 1987-07-02 | Vibration type strain sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6410140A true JPS6410140A (en) | 1989-01-13 |
JPH0468575B2 JPH0468575B2 (ja) | 1992-11-02 |
Family
ID=15826504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16617787A Granted JPS6410140A (en) | 1987-07-02 | 1987-07-02 | Vibration type strain sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6410140A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001036319A1 (en) * | 1999-11-15 | 2001-05-25 | Sarnoff Corporation | Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
US6410912B1 (en) | 1999-11-15 | 2002-06-25 | Sarnoff Corporation | Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
JP2013120081A (ja) * | 2011-12-06 | 2013-06-17 | Yokogawa Electric Corp | 振動式トランスデューサの製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5845531A (ja) * | 1981-09-14 | 1983-03-16 | Fuji Electric Co Ltd | 圧力センサ |
JPS60186725A (ja) * | 1984-03-06 | 1985-09-24 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPS61107125A (ja) * | 1984-10-30 | 1986-05-26 | Yokogawa Hokushin Electric Corp | 圧力センサ |
-
1987
- 1987-07-02 JP JP16617787A patent/JPS6410140A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5845531A (ja) * | 1981-09-14 | 1983-03-16 | Fuji Electric Co Ltd | 圧力センサ |
JPS60186725A (ja) * | 1984-03-06 | 1985-09-24 | Yokogawa Hokushin Electric Corp | 圧力センサ |
JPS61107125A (ja) * | 1984-10-30 | 1986-05-26 | Yokogawa Hokushin Electric Corp | 圧力センサ |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001036319A1 (en) * | 1999-11-15 | 2001-05-25 | Sarnoff Corporation | Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
US6410912B1 (en) | 1999-11-15 | 2002-06-25 | Sarnoff Corporation | Method for reducing variations in arrays of micro-machined cantilever structures using ion implantation |
JP2013120081A (ja) * | 2011-12-06 | 2013-06-17 | Yokogawa Electric Corp | 振動式トランスデューサの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0468575B2 (ja) | 1992-11-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term | ||
FPAY | Renewal fee payment (prs date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20071102 Year of fee payment: 15 |