JPS639761U - - Google Patents

Info

Publication number
JPS639761U
JPS639761U JP1986104100U JP10410086U JPS639761U JP S639761 U JPS639761 U JP S639761U JP 1986104100 U JP1986104100 U JP 1986104100U JP 10410086 U JP10410086 U JP 10410086U JP S639761 U JPS639761 U JP S639761U
Authority
JP
Japan
Prior art keywords
induction coil
mass spectrometer
inductively coupled
electrostatic shield
aerosol
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986104100U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986104100U priority Critical patent/JPS639761U/ja
Priority to CN87104633A priority patent/CN1007852B/zh
Priority to EP87109716A priority patent/EP0252475B1/en
Priority to DE8787109716T priority patent/DE3776436D1/de
Priority to US07/070,698 priority patent/US4804838A/en
Publication of JPS639761U publication Critical patent/JPS639761U/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Description

【図面の簡単な説明】
第１図は本考案の実施例の誘導結合プラズマ質
量分析計の構成図、第２図は静電シールドの斜視
図、第３図はイオンの全エネルギー分布を従来例
と本考案のものとを比較して示す特性図である。 １……誘導結合プラズマ質量分析計、２……誘
導コイル、４……プラズマトーチ、１０……静電
シールド。

Claims (1)

    【実用新案登録請求の範囲】
  1. 高周波磁界を発生させる誘導コイルとエアロゾ
    ルが導入されるプラズマトーチとの間に、誘導コ
    イルからの電界を遮蔽する静電シールドを配置し
    たことを特徴とする誘導結合プラズマ質量分折計
    。
JP1986104100U 1986-07-07 1986-07-07 Pending JPS639761U (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP1986104100U JPS639761U (ja) 1986-07-07 1986-07-07
CN87104633A CN1007852B (zh) 1986-07-07 1987-07-06 感应耦合等离子体质量分析仪
EP87109716A EP0252475B1 (en) 1986-07-07 1987-07-06 Inductively-coupled radio frequency plasma mass spectrometer
DE8787109716T DE3776436D1 (de) 1986-07-07 1987-07-06 Induktiv gekoppeltes hochfrequenz-plasma-massenspektrometer.
US07/070,698 US4804838A (en) 1986-07-07 1987-07-07 Inductively-coupled radio frequency plasma mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986104100U JPS639761U (ja) 1986-07-07 1986-07-07

Publications (1)

Publication Number Publication Date
JPS639761U true JPS639761U (ja) 1988-01-22

Family

ID=14371699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986104100U Pending JPS639761U (ja) 1986-07-07 1986-07-07

Country Status (5)

Country Link
US (1) US4804838A (ja)
EP (1) EP0252475B1 (ja)
JP (1) JPS639761U (ja)
CN (1) CN1007852B (ja)
DE (1) DE3776436D1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215554A (ja) * 1988-07-01 1990-01-19 Jeol Ltd 高周波誘導結合プラズマ質量分析装置
JPH0376406U (ja) * 1989-11-27 1991-07-31

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5059866A (en) * 1987-10-01 1991-10-22 Apricot S.A. Method and apparatus for cooling electrons, ions or plasma
JPH02215038A (ja) * 1989-02-15 1990-08-28 Hitachi Ltd マイクロ波プラズマ極微量元素分析装置
US5229605A (en) * 1990-01-05 1993-07-20 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Process for the elementary analysis of a specimen by high frequency inductively coupled plasma mass spectrometry and apparatus for carrying out this process
JPH05251038A (ja) * 1992-03-04 1993-09-28 Hitachi Ltd プラズマイオン質量分析装置
JP3215487B2 (ja) * 1992-04-13 2001-10-09 セイコーインスツルメンツ株式会社 誘導結合プラズマ質量分析装置
DE4333469A1 (de) * 1993-10-01 1995-04-06 Finnigan Mat Gmbh Massenspektrometer mit ICP-Quelle
DE69530002T2 (de) * 1994-12-20 2004-01-08 Varian Australia Pty. Ltd., Mulgrave Spektrometer mit entladungsbegrenzenden mitteln
AU696281B2 (en) * 1994-12-20 1998-09-03 Agilent Technologies Australia (M) Pty Ltd Spectrometer with discharge limiting means
US5903106A (en) * 1997-11-17 1999-05-11 Wj Semiconductor Equipment Group, Inc. Plasma generating apparatus having an electrostatic shield
CN102184831B (zh) * 2011-03-10 2013-05-08 大连理工大学 一种发射光谱诊断低气压等离子体炬空间分布特性的方法
CN109950124A (zh) * 2019-04-17 2019-06-28 大连民族大学 一种消除电感耦合等离子体质谱二次放电的射频线圈
US11145501B2 (en) * 2020-02-20 2021-10-12 Perkinelmer, Inc. Thermal management for instruments including a plasma source

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3937955A (en) * 1974-10-15 1976-02-10 Nicolet Technology Corporation Fourier transform ion cyclotron resonance spectroscopy method and apparatus
JPS6016163B2 (ja) * 1978-02-03 1985-04-24 株式会社日立製作所 ガス絶縁電気機器およびその部分放電検出方法
US4392083A (en) * 1981-11-20 1983-07-05 Teletype Corporation Radiation shield for a cathode ray tube
CA1189201A (en) * 1982-12-08 1985-06-18 Donald J. Douglas Method and apparatus for sampling a plasma into a vacuum chamber
US4501965A (en) * 1983-01-14 1985-02-26 Mds Health Group Limited Method and apparatus for sampling a plasma into a vacuum chamber
CA1245778A (en) * 1985-10-24 1988-11-29 John B. French Mass analyzer system with reduced drift
GB8602463D0 (en) * 1986-01-31 1986-03-05 Vg Instr Group Mass spectrometer
US4682026A (en) * 1986-04-10 1987-07-21 Mds Health Group Limited Method and apparatus having RF biasing for sampling a plasma into a vacuum chamber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0215554A (ja) * 1988-07-01 1990-01-19 Jeol Ltd 高周波誘導結合プラズマ質量分析装置
JPH0376406U (ja) * 1989-11-27 1991-07-31

Also Published As

Publication number Publication date
CN1007852B (zh) 1990-05-02
EP0252475A3 (en) 1989-07-05
DE3776436D1 (de) 1992-03-12
CN87104633A (zh) 1988-01-20
EP0252475A2 (en) 1988-01-13
EP0252475B1 (en) 1992-01-29
US4804838A (en) 1989-02-14

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