JPS639758B2 - - Google Patents
Info
- Publication number
- JPS639758B2 JPS639758B2 JP57159671A JP15967182A JPS639758B2 JP S639758 B2 JPS639758 B2 JP S639758B2 JP 57159671 A JP57159671 A JP 57159671A JP 15967182 A JP15967182 A JP 15967182A JP S639758 B2 JPS639758 B2 JP S639758B2
- Authority
- JP
- Japan
- Prior art keywords
- amorphous semiconductor
- semiconductor layer
- type
- solar cell
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000012535 impurity Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 51
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 12
- 229910052796 boron Inorganic materials 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 6
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/20—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57159671A JPS5950575A (ja) | 1982-09-16 | 1982-09-16 | 太陽電池の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57159671A JPS5950575A (ja) | 1982-09-16 | 1982-09-16 | 太陽電池の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5950575A JPS5950575A (ja) | 1984-03-23 |
JPS639758B2 true JPS639758B2 (fr) | 1988-03-01 |
Family
ID=15698784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57159671A Granted JPS5950575A (ja) | 1982-09-16 | 1982-09-16 | 太陽電池の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5950575A (fr) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5743413A (en) * | 1980-05-19 | 1982-03-11 | Energy Conversion Devices Inc | Semiconductor element and method of producing same |
JPS5762537A (en) * | 1980-10-02 | 1982-04-15 | Semiconductor Energy Lab Co Ltd | Forming method for film |
-
1982
- 1982-09-16 JP JP57159671A patent/JPS5950575A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5743413A (en) * | 1980-05-19 | 1982-03-11 | Energy Conversion Devices Inc | Semiconductor element and method of producing same |
JPS5762537A (en) * | 1980-10-02 | 1982-04-15 | Semiconductor Energy Lab Co Ltd | Forming method for film |
Also Published As
Publication number | Publication date |
---|---|
JPS5950575A (ja) | 1984-03-23 |
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