JPS639733B2 - - Google Patents

Info

Publication number
JPS639733B2
JPS639733B2 JP57163091A JP16309182A JPS639733B2 JP S639733 B2 JPS639733 B2 JP S639733B2 JP 57163091 A JP57163091 A JP 57163091A JP 16309182 A JP16309182 A JP 16309182A JP S639733 B2 JPS639733 B2 JP S639733B2
Authority
JP
Japan
Prior art keywords
weight
permanent magnet
nax
content
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57163091A
Other languages
Japanese (ja)
Other versions
JPS5952822A (en
Inventor
Tetsuhiko Mizoguchi
Masashi Sahashi
Koichiro Inomata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP57163091A priority Critical patent/JPS5952822A/en
Publication of JPS5952822A publication Critical patent/JPS5952822A/en
Publication of JPS639733B2 publication Critical patent/JPS639733B2/ja
Granted legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/032Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
    • H01F1/04Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
    • H01F1/047Alloys characterised by their composition
    • H01F1/053Alloys characterised by their composition containing rare earth metals
    • H01F1/055Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5
    • H01F1/0555Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 pressed, sintered or bonded together
    • H01F1/0557Alloys characterised by their composition containing rare earth metals and magnetic transition metals, e.g. SmCo5 pressed, sintered or bonded together sintered

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Hard Magnetic Materials (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

〔発明の技術分野〕 本発明はサマリウム(Sm)−コバルト(Co)
系永久磁石、とりわけSm2Co17系永久磁石の製造
法に関し、更に詳しくは残留磁束密度(Br)、保
磁力( IHC)、最大エネルギー積((BH)nax)な
どの磁気特性に優れ、また、耐酸化性にも優れた
永久磁石の製造法に関する。 〔発明の技術的背景とその問題点〕 従来から、R−M系(RはSm、Ce、Yなどの
希土類元素、MはCo及びCoとともにCu、Feなど
の金属元素)永久磁石に関しては各種組成のもの
が提案されている。 これら永久磁石にあつては、最大エネルギー積
((BH)nax)及び残留磁束密度(Br)がモーター
等の用途においては特に重要な特性であり、その
値は可能な限り大きなことが望ましい。しかしな
がら、これらの値の該磁石の保磁力( IHC)が
ある一定値以上でないと高めることは困難であ
る。したがつて、(BH)nax、Brの大きい永久磁
石を得るためには IHCを大きくすることが必要
となる。 ところで、Sm2(Co、Cu、Fe、Ti)17系の磁石
では、Fe含量を増したり、Cu含量を減らすとBr
を増加させ得ることが知られている。しかし、
Fe含量を増したり、Cu含量を減らすと IHCが低
下して来るため、単純にFe含量を増しCu含量を
減らすことによつてBrや(BH)naxの向上を図る
ことはできない。そのため、従来のSm2(Co、
Cu、Fe、Ti)17系の磁石は、 IHCをある値以上に
維持しながら、Brを可能な限り大きくすること
を目的としてその組成が決定されてきた。例え
ば、特公昭55−15096号公報には、Y及び他の希
土類元素10〜30重量%と、Ti0.2〜7重量%と、
Cu5〜20重量%と、Fe2〜15重量%とを含み、残
部がCoを主成分とする金属粉末を磁界中で成形
した後焼結して成る永久磁石は、耐酸化性及び I
HC、(BH)naxなどの磁気特性に優れることが開
示されている。また、特開昭52−109191号公報に
は、Sm23〜30重量%と、Ti0.2〜1.5重量%と、
Cu9〜13重量%と、Fe3〜12重量%とを含み、残
部がCoを主成分とする金属粉末を磁界中で成形
した後、焼結して成る永久磁石が開示されてい
る。 しかしながら、これらの組成は、Cu含量及び
Fe含量の変動に伴つて起る、残留磁束密度(Br)
と保磁力( IHC)の変化を妥協的に適合させた
結果であるから、必ずしも充分なものとは言えな
いものであつた。 〔発明の目的〕 本発明は、前述した従来の永久磁石の製造法の
欠点を解消したもので、Br、(BH)naxIHC
どの磁気特性に優れ、また耐酸化性も優れた
Sm2Co17系永久磁石の製造法を提供することを目
的とする。 〔発明の概要〕 Brを低下させるCu分を減らし、Brを向上させ
るFe分を増加させ、同時に IHCを一定値以上に
保持することができれば、Br及び(BH)naxの大
きい優れた磁気特性を有する永久磁石を得ること
ができる。 本発明者らは、上記の課題を達成すべく永久磁
石を構成する合金の組成及び熱処理過程に関し鋭
意研究を重ねた結果、該合金の組成をSm(Co、
Cu、Fe、Ti)zの式で表した場合、z>6.9でしか
も焼結後に特定の時効処理を施すと、Fe量を増
しCu量を減らすことによつても従来の知見とは
全く逆に IHCを増加させ得るとの事実を見出し、
該知見に基づいてBr及び(BH)naxを著しく高め
た永久磁石を開発し、既に特願昭56−103434号と
して特許出願した。 本発明者らは、Sm2Co17系永久磁石の磁気特性
及び耐酸化性をより改善すべく、該永久磁石の組
成及び処理過程に関し更に研究を重ねた結果、あ
る組成の金属粉末を焼結した後、該焼結体を600
℃以上700℃未満の温度で所定時間保持し、5
℃/min以下の冷却速度で徐冷すると得られた永
久磁石の IHCが著しく増大するとの事実を見出
し本発明を完成するに至つた。 即ち、本発明の永久磁石の製造法は、Sm26〜
29重量%と、Ti0.2〜3重量%と、Cu3〜9重量
%と、Fe14〜20重量%(但し、14重量%を含ま
ない。)とを含み、残部が主としてCoである金属
粉末を磁界中で成形し、次いで得られた成形体を
焼結し、600℃以上700℃未満の温度範囲において
0.1秒〜2時間保持した後、毎分5℃以下の冷却
速度で徐冷することを特徴とする。 原料の金属粉末において、Smの含量は26〜29
重量%であつて、26重量%未満の場合には IHC
の増大はなく、また、29重量%を超えると IHC
は減少すると同時にBrも減少して(BH)naxの増
大がはかれない。Tiは0.2〜3重量%であつて、
Tiが0.2重量%未満の場合には IHCが顕著には増
大せず、3重量%を超えるとBrが減少する。Cu
は3〜9重量%であつて、3重量%未満の場合に
IHCの増大がはかれず、9重量%を超えると
Brが減少すると同時に後述する熱処理効果が小
さくなり、結果として(BH)naxも特に増大する
ことがない。Feは14重量%を超えるが20重量%
以下であつて、14重量%以下では熱処理効果が小
さく、また20重量%を超えると IHCが減少し、
熱処理効果も小さく、したがつて(BH)naxが減
少する。原料の金属粉末の残部は主としてCoで
ある。 本発明の永久磁石の製造法は次のようにして行
なわれる。即ち、まず、上記した配合比の金属粉
末を、所定の押し型に充填した後、磁界中で圧縮
成形して成形体とし、該成形体を、真空、窒素、
希ガス等の不活性雰囲気中で焼結する。焼結温度
は通常1050〜1250℃の温度が適用される。 得られた焼結体は、次に、本発明における第2
の特徴である所定の熱処理が施される。すなわ
ち、まず、焼結体は上記したような不活性雰囲気
中で、600℃以上700℃未満の温度で所定時間保持
される。処理温度がこの範囲を外れると、得られ
た永久磁石の IHC及び(BH)naxが著しく減少す
る。また、このとき、処理時間は、通常0.1秒〜
2時間で充分である。 その後、焼結体を5℃/min以下の冷却速度で
徐冷することにより目的とする永久磁石を得るこ
とができる。 このとき、冷却速度が5℃/minより大きいと
きには、 IHCの増大は充分でない。 〔発明の実施例〕 以下、実施例により本発明を更に詳細に説明す
る。 まず、永久磁石は次のようにして製造した。 所定の組成比で各金属元素を配合して、その約
4Kgを真空高周波誘導加熱炉で溶融後冷却し、得
られたインゴツトを粗粉砕後、ジエツトミルで粉
砕して微粉末とした。この微粉末を所定の押し型
に充填し、20000エルステツドの磁界をかけなが
ら2ton/cm2の圧力で圧縮成形した。得られた成形
体にアルゴン雰囲気中で所定温度、所定時間の焼
結処理を施した後、直ちに室温まで一旦冷却し、
ついで再び所定温度で所定時間保持した後、徐冷
処理を施した。以下に%は重量%を表わす。 実施例 1 IHC、(BH)naxのCu含量依存性と熱処理の効
果 組成:Sm27.6%、Ti1.1%、Fe15.5%、Cu2〜
11.5%、Co残部 焼結条件:1165℃×1時間 熱処理:650℃で1時間保持した後、2℃/min
の冷却速度で徐冷。 比較のために、熱処理を行なわない外は、実施
例1と同様にして別の永久磁石(比較例1)を製
造した。 得られた永久磁石のCu含量と、 IHC、(BH)na
との関係を第1図に示した。図において、曲線
A:実施例1の IHC、曲線a:比較例1の IHC
曲線B:実施例1の(BH)nax、曲線b:比較例
1の(BH)naxを表わす。 図から明らかなように、本発明の製造法により
製造した永久磁石は、Cu9%以下でも IHCが大き
く、また、(BH)naxのピークも熱処理前には
Cu:10〜11%であつたものが、7〜8%以下の
ところにシフトし、かつ、(BH)naxの値も可成り
増大している。 実施例 2 実施例にかかる試料21〜23と比較試料21〜31を
製造した。各試料の組成、焼結条件を表に示し
た。熱処理の条件は、次のとおりであつた。表
中、番号で示した熱処理のパターンはそれぞれ以
下のとおりである。 1:650℃で1時間+2℃/minで徐冷。 2:600℃で1時間+10℃/minで徐冷。 3:750℃で1時間+2℃/minで徐冷。 4:550℃で1時間+2℃/minで徐冷。
[Technical field of the invention] The present invention relates to samarium (Sm)-cobalt (Co)
Regarding the manufacturing method of Sm 2 Co 17 type permanent magnets, especially Sm 2 Co 17 type permanent magnets. The present invention also relates to a method for producing a permanent magnet that has excellent oxidation resistance. [Technical background of the invention and its problems] Conventionally, there have been various types of permanent magnets of the RM system (R is a rare earth element such as Sm, Ce, Y, etc., and M is a metal element such as Co and Co as well as Cu and Fe). compositions have been proposed. For these permanent magnets, the maximum energy product ((BH) nax ) and residual magnetic flux density (Br) are particularly important characteristics in applications such as motors, and it is desirable that these values be as large as possible. However, it is difficult to increase the coercive force ( I H C ) of the magnet having these values unless it exceeds a certain value. Therefore, in order to obtain a permanent magnet with large (BH) nax and Br, it is necessary to increase I H C. By the way, in Sm 2 (Co, Cu, Fe, Ti) 17 -based magnets, when the Fe content is increased or the Cu content is decreased, the Br
It is known that it can increase but,
If the Fe content is increased or the Cu content is decreased, I H C decreases, so it is not possible to improve Br or (BH) nax by simply increasing the Fe content and decreasing the Cu content. Therefore, the conventional Sm 2 (Co,
The composition of 17- based magnets (Cu, Fe, Ti) has been determined with the aim of increasing Br as much as possible while maintaining I H C above a certain value. For example, in Japanese Patent Publication No. 55-15096, 10 to 30% by weight of Y and other rare earth elements, 0.2 to 7% by weight of Ti,
Permanent magnets are produced by molding metal powder containing 5 to 20% by weight of Cu, 2 to 15% by weight of Fe, and the remainder being Co as a main component, and then sintering it in a magnetic field .
It has been disclosed that it has excellent magnetic properties such as H C and (BH) nax . In addition, JP-A No. 52-109191 discloses that Sm23 to 30% by weight, Ti 0.2 to 1.5% by weight,
A permanent magnet is disclosed in which a metal powder containing 9 to 13% by weight of Cu and 3 to 12% by weight of Fe, with the remainder being mainly Co, is molded in a magnetic field and then sintered. However, these compositions are limited by Cu content and
Residual magnetic flux density (Br) caused by variation of Fe content
This result was obtained by compromisingly adapting the changes in coercive force ( I H C ) and coercive force (I H C ), so it could not necessarily be said to be sufficient. [ Objective of the Invention] The present invention eliminates the drawbacks of the conventional permanent magnet manufacturing method described above, and has excellent magnetic properties such as Br, (BH) nax , and IHC , as well as excellent oxidation resistance.
The purpose of this invention is to provide a method for manufacturing Sm 2 Co 17 -based permanent magnets. [Summary of the invention] If it is possible to reduce the Cu content, which lowers Br, increase the Fe content, which improves Br, and at the same time maintain I H C above a certain value, an excellent magnetic material with large Br and (BH) nax can be obtained. Permanent magnets with special characteristics can be obtained. In order to achieve the above-mentioned problems, the present inventors have conducted intensive research on the composition and heat treatment process of the alloy constituting the permanent magnet, and as a result, the composition of the alloy has been determined to be Sm(Co,
(Cu, Fe, Ti) When expressed by the formula z , if z > 6.9 and a specific aging treatment is performed after sintering, even if the amount of Fe is increased and the amount of Cu is decreased, the result is completely contrary to conventional knowledge. It was discovered that IHC can be increased to
Based on this knowledge, we developed a permanent magnet with significantly increased Br and (BH) nax , and have already filed a patent application for it as Japanese Patent Application No. 103434/1983. In order to further improve the magnetic properties and oxidation resistance of Sm 2 Co 17 -based permanent magnets, the present inventors conducted further research on the composition and processing process of permanent magnets, and as a result, they succeeded in sintering metal powder with a certain composition. After that, the sintered body was
Hold at a temperature of ℃ or higher and lower than 700℃ for a specified period of time, and
The present invention was completed based on the discovery that the I H C of the obtained permanent magnet increases significantly when the permanent magnet is slowly cooled at a cooling rate of 0.degree. C./min or less. That is, the method for manufacturing permanent magnets of the present invention is based on Sm26~
29% by weight, 0.2 to 3% by weight of Ti, 3 to 9% by weight of Cu, and 14 to 20% by weight of Fe (however, excluding 14% by weight), with the balance being mainly Co. Molding in a magnetic field, then sintering the obtained molded body in a temperature range of 600°C or more and less than 700°C.
After holding for 0.1 seconds to 2 hours, it is characterized by slow cooling at a cooling rate of 5° C. or less per minute. In the raw metal powder, the Sm content is 26 to 29
% by weight, and if it is less than 26% by weight, I H C
There was no increase in I H C when it exceeded 29% by weight.
At the same time, Br decreases (BH) and nax increases. Ti is 0.2 to 3% by weight,
When Ti is less than 0.2% by weight, I H C does not increase significantly, and when Ti exceeds 3% by weight, Br decreases. Cu
is 3 to 9% by weight; if it is less than 3% by weight, no increase in IHC can be achieved, and if it exceeds 9% by weight,
At the same time as Br decreases, the heat treatment effect described later becomes smaller, and as a result, (BH) nax does not particularly increase. Fe exceeds 14% by weight but 20% by weight
If it is less than 14% by weight, the heat treatment effect will be small, and if it exceeds 20% by weight, I H C will decrease,
The heat treatment effect is also small, thus reducing (BH) nax . The remainder of the raw metal powder is mainly Co. The method for manufacturing a permanent magnet of the present invention is carried out as follows. That is, first, a predetermined pressing mold is filled with metal powder having the above-mentioned mixing ratio, and then compression molded in a magnetic field to form a compact, and the compact is heated in a vacuum, nitrogen,
Sinter in an inert atmosphere such as a rare gas. The sintering temperature is usually 1050 to 1250°C. The obtained sintered body is then used in the second method of the present invention.
A predetermined heat treatment, which is a characteristic feature of That is, first, the sintered body is held at a temperature of 600° C. or more and less than 700° C. for a predetermined time in an inert atmosphere as described above. When the processing temperature is outside this range, the I H C and (BH) nax of the obtained permanent magnet are significantly reduced. Also, at this time, the processing time is usually 0.1 seconds ~
2 hours is enough. Thereafter, the desired permanent magnet can be obtained by slowly cooling the sintered body at a cooling rate of 5° C./min or less. At this time, when the cooling rate is higher than 5° C./min, the increase in I H C is not sufficient. [Examples of the Invention] The present invention will be explained in more detail below with reference to Examples. First, a permanent magnet was manufactured as follows. Each metal element was blended in a predetermined composition ratio, approximately 4 kg of the ingot was melted in a vacuum high-frequency induction heating furnace, and then cooled. The obtained ingot was coarsely ground and then ground in a jet mill to form a fine powder. This fine powder was filled into a predetermined mold and compression molded at a pressure of 2 tons/cm 2 while applying a magnetic field of 20,000 Oersted. The obtained molded body was subjected to sintering treatment at a predetermined temperature and for a predetermined time in an argon atmosphere, and then immediately cooled to room temperature.
Then, after being held again at a predetermined temperature for a predetermined time, a slow cooling treatment was performed. In the following, % represents weight %. Example 1 Cu content dependence of I H C , (BH) nax and effect of heat treatment Composition: Sm27.6%, Ti1.1%, Fe15.5%, Cu2~
11.5%, remaining Co Sintering conditions: 1165℃ x 1 hour Heat treatment: After holding at 650℃ for 1 hour, 2℃/min
Slow cooling at a cooling rate of For comparison, another permanent magnet (Comparative Example 1) was manufactured in the same manner as in Example 1, except that no heat treatment was performed. The Cu content of the obtained permanent magnet and I H C , (BH) na
The relationship with x is shown in Figure 1. In the figure, curve A: I H C of Example 1, curve a: I H C of Comparative Example 1,
Curve B: (BH) nax of Example 1, Curve b: (BH) nax of Comparative Example 1. As is clear from the figure, the permanent magnet manufactured by the manufacturing method of the present invention has a large I H C even with Cu of 9% or less, and the (BH) nax peak also decreases before heat treatment.
Cu: from 10 to 11% has shifted to 7 to 8% or less, and the (BH) nax value has also increased considerably. Example 2 Samples 21 to 23 according to the example and comparative samples 21 to 31 were manufactured. The composition and sintering conditions of each sample are shown in the table. The conditions for the heat treatment were as follows. The heat treatment patterns indicated by numbers in the table are as follows. 1: Slow cooling at 650℃ for 1 hour + 2℃/min. 2: Slow cooling at 600℃ for 1 hour + 10℃/min. 3: Slow cooling at 750℃ for 1 hour + 2℃/min. 4: Slow cooling at 550℃ for 1 hour + 2℃/min.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明の製造法により製
造した永久磁石はその磁気特性が大幅に向上す
る。これは、Sm2Co17系永久磁石にあつては、
R2Co17相及びRCo5相から成る2相分離型のセル
構造を有する組織になるが、これらの組織形態及
び両相の磁気特性の改善がなされたためであると
考えられる。 なお、本発明の製造法により製造した永久磁石
は、Tiが含有されていることにより、その耐酸
化性も向上する。
As explained above, the permanent magnet manufactured by the manufacturing method of the present invention has significantly improved magnetic properties. This is true for Sm 2 Co 17 permanent magnets.
The structure has a two-phase separated cell structure consisting of R 2 Co 17 phase and RCo 5 phase, and this is thought to be due to improvements in the structure morphology and magnetic properties of both phases. Note that the permanent magnet manufactured by the manufacturing method of the present invention also has improved oxidation resistance due to the inclusion of Ti.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は IHC、(BH)naxのCu含有依存性と熱
処理の効果を表わす図であり、第2図は実施例3
で示した組成の永久磁石の(BH)naxと冷却速度
との関係図である。
Figure 1 is a diagram showing the dependence of I H C and (BH) nax on Cu content and the effect of heat treatment, and Figure 2 is a diagram showing the effect of heat treatment in Example 3.
FIG. 2 is a diagram showing the relationship between (BH) nax and cooling rate of a permanent magnet having the composition shown in FIG.

Claims (1)

【特許請求の範囲】[Claims] 1 サマリウム26〜29重量%と、チタン0.2〜3
重量%と、銅3〜9重量%と、鉄14〜20重量%
(但し、14重量%を含まない。)とを含み、残部が
主としてコバルトである金属粉末を磁界中で成形
し、次いで得られた成形体を焼結し、600℃以上
700℃未満の温度範囲において0.1秒〜2時間保持
した後、毎分5℃以下の冷却速度で徐冷すること
を特徴とする永久磁石の製造法。
1 26-29% samarium by weight and 0.2-3% titanium
% by weight, 3-9% by weight of copper, and 14-20% by weight of iron.
(However, it does not contain 14% by weight.) and the balance is mainly cobalt.The metal powder is compacted in a magnetic field, and the resulting compact is then sintered at a temperature of 600℃ or higher.
A method for producing a permanent magnet, which comprises holding the magnet in a temperature range of less than 700°C for 0.1 seconds to 2 hours, and then slowly cooling it at a cooling rate of 5°C or less per minute.
JP57163091A 1982-09-21 1982-09-21 Manufacture of permanent magnet Granted JPS5952822A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57163091A JPS5952822A (en) 1982-09-21 1982-09-21 Manufacture of permanent magnet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57163091A JPS5952822A (en) 1982-09-21 1982-09-21 Manufacture of permanent magnet

Publications (2)

Publication Number Publication Date
JPS5952822A JPS5952822A (en) 1984-03-27
JPS639733B2 true JPS639733B2 (en) 1988-03-01

Family

ID=15767011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57163091A Granted JPS5952822A (en) 1982-09-21 1982-09-21 Manufacture of permanent magnet

Country Status (1)

Country Link
JP (1) JPS5952822A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0658534B2 (en) * 1983-03-03 1994-08-03 東レ株式会社 Actinic radiation-sensitive polymer composition
JPS6399235A (en) * 1986-06-02 1988-04-30 Toray Ind Inc Photosensitive polyimide composition
US5777068A (en) * 1994-09-13 1998-07-07 Nippon Zeon Co., Ltd. Photosensitive polyimide resin composition
JP3170174B2 (en) 1995-04-18 2001-05-28 日本ゼオン株式会社 Polyimide resin composition
JP3382081B2 (en) * 1995-06-01 2003-03-04 株式会社東芝 Resist and pattern forming method using the same
US6160081A (en) * 1997-10-31 2000-12-12 Nippon Zeon Co., Ltd. Photosensitive polyimide resin composition
US6686106B2 (en) 2000-06-26 2004-02-03 Ube Industries, Ltd. Photosensitive resin compositions, insulating films, and processes for formation of the films

Also Published As

Publication number Publication date
JPS5952822A (en) 1984-03-27

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