JPS6396160U - - Google Patents
Info
- Publication number
- JPS6396160U JPS6396160U JP19068286U JP19068286U JPS6396160U JP S6396160 U JPS6396160 U JP S6396160U JP 19068286 U JP19068286 U JP 19068286U JP 19068286 U JP19068286 U JP 19068286U JP S6396160 U JPS6396160 U JP S6396160U
- Authority
- JP
- Japan
- Prior art keywords
- clean room
- area
- equipment
- wafers
- room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 238000004378 air conditioning Methods 0.000 claims 1
- 238000012423 maintenance Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19068286U JPS6396160U (enExample) | 1986-12-12 | 1986-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19068286U JPS6396160U (enExample) | 1986-12-12 | 1986-12-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6396160U true JPS6396160U (enExample) | 1988-06-21 |
Family
ID=31144132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19068286U Pending JPS6396160U (enExample) | 1986-12-12 | 1986-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6396160U (enExample) |
-
1986
- 1986-12-12 JP JP19068286U patent/JPS6396160U/ja active Pending
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