JPS63943B2 - - Google Patents

Info

Publication number
JPS63943B2
JPS63943B2 JP54156620A JP15662079A JPS63943B2 JP S63943 B2 JPS63943 B2 JP S63943B2 JP 54156620 A JP54156620 A JP 54156620A JP 15662079 A JP15662079 A JP 15662079A JP S63943 B2 JPS63943 B2 JP S63943B2
Authority
JP
Japan
Prior art keywords
pattern
transferred
wafer
chip
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54156620A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5679431A (en
Inventor
Yoji Yamanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP15662079A priority Critical patent/JPS5679431A/ja
Publication of JPS5679431A publication Critical patent/JPS5679431A/ja
Publication of JPS63943B2 publication Critical patent/JPS63943B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP15662079A 1979-12-03 1979-12-03 Manufacture of semiconductor integrated circuit device Granted JPS5679431A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15662079A JPS5679431A (en) 1979-12-03 1979-12-03 Manufacture of semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15662079A JPS5679431A (en) 1979-12-03 1979-12-03 Manufacture of semiconductor integrated circuit device

Publications (2)

Publication Number Publication Date
JPS5679431A JPS5679431A (en) 1981-06-30
JPS63943B2 true JPS63943B2 (enExample) 1988-01-09

Family

ID=15631688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15662079A Granted JPS5679431A (en) 1979-12-03 1979-12-03 Manufacture of semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS5679431A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814137A (ja) * 1981-07-16 1983-01-26 Fujitsu Ltd 縮小投影露光方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5420317A (en) * 1977-07-15 1979-02-15 Taiyo Electric Mfg Exciter for brushless ac generator
JPS5662323A (en) * 1979-10-26 1981-05-28 Fujitsu Ltd Reticle examination method

Also Published As

Publication number Publication date
JPS5679431A (en) 1981-06-30

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