JPS639339B2 - - Google Patents

Info

Publication number
JPS639339B2
JPS639339B2 JP56128889A JP12888981A JPS639339B2 JP S639339 B2 JPS639339 B2 JP S639339B2 JP 56128889 A JP56128889 A JP 56128889A JP 12888981 A JP12888981 A JP 12888981A JP S639339 B2 JPS639339 B2 JP S639339B2
Authority
JP
Japan
Prior art keywords
cylinder
ion beam
metal
cylindrical body
melting point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56128889A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5830055A (ja
Inventor
Chikao Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Radio Co Ltd
Original Assignee
Japan Radio Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Radio Co Ltd filed Critical Japan Radio Co Ltd
Priority to JP56128889A priority Critical patent/JPS5830055A/ja
Publication of JPS5830055A publication Critical patent/JPS5830055A/ja
Publication of JPS639339B2 publication Critical patent/JPS639339B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP56128889A 1981-08-18 1981-08-18 イオンビ−ム源 Granted JPS5830055A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56128889A JPS5830055A (ja) 1981-08-18 1981-08-18 イオンビ−ム源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56128889A JPS5830055A (ja) 1981-08-18 1981-08-18 イオンビ−ム源

Publications (2)

Publication Number Publication Date
JPS5830055A JPS5830055A (ja) 1983-02-22
JPS639339B2 true JPS639339B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-02-27

Family

ID=14995850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56128889A Granted JPS5830055A (ja) 1981-08-18 1981-08-18 イオンビ−ム源

Country Status (1)

Country Link
JP (1) JPS5830055A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616383B2 (ja) * 1984-04-11 1994-03-02 株式会社日立製作所 イオンビーム形成方法および液体金属イオン源
JPS62237650A (ja) * 1986-04-09 1987-10-17 Hitachi Ltd 金属イオン発生装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475636A (en) * 1967-11-14 1969-10-28 Hughes Aircraft Co Liquid-metal arc cathode with maximized electron/atom emission ratio
GB1574611A (en) * 1976-04-13 1980-09-10 Atomic Energy Authority Uk Ion sources

Also Published As

Publication number Publication date
JPS5830055A (ja) 1983-02-22

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