JPS639177B2 - - Google Patents

Info

Publication number
JPS639177B2
JPS639177B2 JP55017777A JP1777780A JPS639177B2 JP S639177 B2 JPS639177 B2 JP S639177B2 JP 55017777 A JP55017777 A JP 55017777A JP 1777780 A JP1777780 A JP 1777780A JP S639177 B2 JPS639177 B2 JP S639177B2
Authority
JP
Japan
Prior art keywords
waveform
light
face plate
defect
spot
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55017777A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56115944A (en
Inventor
Yasuo Hachikake
Kensaku Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP1777780A priority Critical patent/JPS56115944A/ja
Publication of JPS56115944A publication Critical patent/JPS56115944A/ja
Publication of JPS639177B2 publication Critical patent/JPS639177B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1777780A 1980-02-18 1980-02-18 Detection device of panel plate defect Granted JPS56115944A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1777780A JPS56115944A (en) 1980-02-18 1980-02-18 Detection device of panel plate defect

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1777780A JPS56115944A (en) 1980-02-18 1980-02-18 Detection device of panel plate defect

Publications (2)

Publication Number Publication Date
JPS56115944A JPS56115944A (en) 1981-09-11
JPS639177B2 true JPS639177B2 (enrdf_load_stackoverflow) 1988-02-26

Family

ID=11953140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1777780A Granted JPS56115944A (en) 1980-02-18 1980-02-18 Detection device of panel plate defect

Country Status (1)

Country Link
JP (1) JPS56115944A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58162038A (ja) * 1982-03-23 1983-09-26 Canon Inc 面状態検査装置
DE3800053A1 (de) * 1988-01-04 1989-07-13 Sick Optik Elektronik Erwin Optische fehlerinspektionsvorrichtung
JPS63241343A (ja) * 1988-02-24 1988-10-06 Nikon Corp 欠陥検査装置
KR101103347B1 (ko) * 2009-08-24 2012-01-05 삼성코닝정밀소재 주식회사 평판 유리 표면 이물질 검사 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ZA754657B (en) * 1974-07-27 1976-07-28 Beecham Group Ltd Adhesive composition

Also Published As

Publication number Publication date
JPS56115944A (en) 1981-09-11

Similar Documents

Publication Publication Date Title
JPS6275233A (ja) 光学式板状素材モニタ装置
JPH0574764B2 (enrdf_load_stackoverflow)
JPH0762614B2 (ja) 光センサ
ATE14246T1 (de) Optisch-mechanischer abtastmechanismus.
US4547663A (en) Focus detecting apparatus with a compensation mask
JPH0575049B2 (enrdf_load_stackoverflow)
JPH04319615A (ja) 光学式高さ測定装置
JPS639177B2 (enrdf_load_stackoverflow)
JPH058628B2 (enrdf_load_stackoverflow)
JP2873450B2 (ja) 光による欠点検査装置
JPH0577228B2 (enrdf_load_stackoverflow)
JP3280742B2 (ja) ガラス基板用欠陥検査装置
JPH0669220B2 (ja) 光学スキャナ
JP3106521B2 (ja) 透明基板の光学的検査装置
JPS6262208A (ja) 距離測定装置および距離測定方法
JPH0634560A (ja) 表面状態検査装置
JPS63208747A (ja) 光学検査装置
JPH0643893B2 (ja) 距離測定装置
JP2936644B2 (ja) 異物検査装置
JPH0334577B2 (enrdf_load_stackoverflow)
JPS6321854B2 (enrdf_load_stackoverflow)
JPH06160023A (ja) 車両寸法計測装置
JPS5826325Y2 (ja) 位置検出装置
JPS58216904A (ja) 厚さ測定装置
JPH07119700B2 (ja) 異物検出装置