JPS639174B2 - - Google Patents

Info

Publication number
JPS639174B2
JPS639174B2 JP7860180A JP7860180A JPS639174B2 JP S639174 B2 JPS639174 B2 JP S639174B2 JP 7860180 A JP7860180 A JP 7860180A JP 7860180 A JP7860180 A JP 7860180A JP S639174 B2 JPS639174 B2 JP S639174B2
Authority
JP
Japan
Prior art keywords
sheet
alumina
electrodes
cavity
coating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7860180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS574531A (en
Inventor
Tooru Ishida
Toshibumi Kamyama
Jun Yasuda
Akinobu Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7860180A priority Critical patent/JPS574531A/ja
Publication of JPS574531A publication Critical patent/JPS574531A/ja
Publication of JPS639174B2 publication Critical patent/JPS639174B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP7860180A 1980-06-10 1980-06-10 Manufacture of electrostatic capacity type pressure sensor Granted JPS574531A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7860180A JPS574531A (en) 1980-06-10 1980-06-10 Manufacture of electrostatic capacity type pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7860180A JPS574531A (en) 1980-06-10 1980-06-10 Manufacture of electrostatic capacity type pressure sensor

Publications (2)

Publication Number Publication Date
JPS574531A JPS574531A (en) 1982-01-11
JPS639174B2 true JPS639174B2 (enrdf_load_stackoverflow) 1988-02-26

Family

ID=13666414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7860180A Granted JPS574531A (en) 1980-06-10 1980-06-10 Manufacture of electrostatic capacity type pressure sensor

Country Status (1)

Country Link
JP (1) JPS574531A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6035609A (ja) * 1983-08-06 1985-02-23 Ohtsu Tire & Rubber Co Ltd ラジアルタイヤ
IT1203535B (it) * 1986-02-10 1989-02-15 Marelli Autronica Procedimento per la realizzazione del collegamento meccanico ed elettrico fra due corpi in particolare tra la membrana ed il sopporto di un sensore di pressione a film spesso e dispositivi realizzati con tale procedimento
JPS63292032A (ja) * 1987-05-26 1988-11-29 Ngk Insulators Ltd 圧力検出器
DE3909185A1 (de) * 1989-03-21 1990-09-27 Endress Hauser Gmbh Co Kapazitiver drucksensor und verfahren zu seiner herstellung
JP2718563B2 (ja) * 1990-08-28 1998-02-25 日本特殊陶業株式会社 圧力検出器
ES2212297T3 (es) 1997-06-13 2004-07-16 Bridgestone Corporation Neumaticos radiales robustos.
JP5305644B2 (ja) * 2006-12-25 2013-10-02 京セラ株式会社 圧力センサ用パッケージおよびその製造方法、ならびに圧力センサ
JP2010008115A (ja) * 2008-06-25 2010-01-14 Kyocera Corp 圧力検出装置用基体および圧力検出装置

Also Published As

Publication number Publication date
JPS574531A (en) 1982-01-11

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